Design And Realization For Main Control System Of The Mueller Matrix Ellipsometer

With the development of nanometer optical metrology, ellipsometry is widely used for its capabilities of realizing non-contact, non-destructive and dynamic measurement. Ellipsometer is a scientific instrument measuring the change in the polarization state of light that interacts with the sample. The Mueller matrix ellipsometer is a new new-type ellipsometer, which could achieve all the 16 parameters of a 4x4 Mueller matrix in a single measurement. Therefore the Mueller matrix ellipsometer can acquire more information about the sample, such as the optical properties of anisotropic materials or three-dimensional parameters of nanostructures. Control system is an important part of the Mueller matrix ellipsometer, which acts as a critical role for accurate and precise measurement. This thesis design a MCS(main control system) for the Mueller matrix ellipsometer according to the requirements of metrology, and carry out the test of the Mueller matrix ellipsometer's MCS for demonstration.In this thesis, the Mueller matrix ellipsometer MCS is designed and implemented. The angle control module of the Mueller matrix ellipsometer is designed to control the angle of the two arms of ellipsometer. The angle calibration algorithm is applied to reduce the time of the angle location significantly. Additionally, spectrometer synchronous control module is designed to implement synchronous spectral data collecting, which adapts to different spectrometer models. According to the requirements of the human-computer interaction and recording the working time of deuterium lamp and tungsten lamp, LCD display and time record function module is also implemented.According to the results of the system module tests and integration tests, it's shown that MCS satisfies all the requirements. At the end, the thesis put forward prospect of ellipsometer's MCS designing.