All-dielectric Metasurface-based Polarizing Beam Splitter

Polarizing beam splitter is one of the most important polarized optical elements,and can split an arbitrarily polarized incident beam into two orthogonally polarized beams.Due to its two functions of polarizer and beam splitter,polarizing beam splitter is widely used in optical measurement,optical fiber telecommunications and pharmaceutical science.With the improvement of the theoretical method of micro-nano science and the progress of manufacturing technology,some of optical systems are evolving towards the miniaturization and integration.Especially in the space-limited condition,the minaturization of optical element and optical system is considerable of importance.However,because of the limilation of natural material and corresponding manufacture technology,the conventional polarizing beam splitter suffers from bulky volume,thus isn't suited for the miniaturing integration of optical system.Metasurfaces,artificially planar structures consisiting of subwavelength scatters arranged with subwavelength period on a planar surface,enable control of phase,amplitude,and polarization of light in a sub-wavelength distance.Among these metasurfaces,the all-dielectric metasurface based on the vibration of polar phonons in dielectric material has a great potential and advantege in realizing the miniaturization of optical element and the miniaturizing integration of optical system,because it enables the efficient control of light,realization of integrating multi-functions into one element,and its manufacturing technology is compatible with currently existing semiconductor processes.Accordingly,this dissertation concentrates on the all-dielectric metasurface-based polarizing beam splitter,and its design method,characteristics method and the application in angular measurement are explored.The main contents and innovations of this dissertation are as follows:The relationship between performance of all-dielectric metasurface-based polarizing beam splitter and transmission coefficient of all-dielectric metasurface unit is established,then a method based on this relationship is proposed for the optimal design of all-dielectric metasurface-based polarizing beam splitter.Consequently all-dielectric metasurface-based circularly polarizing beam splitter and linearly polarizing beam splitter with high performance are designed and analyzed.The transmission property of all-dielectric metasurface unit,approximation of the local effect and influence of the dimensional error are investigated.The effectiveness of this approximation is revealed,and it is because that the energy of light is mostly confined inside the scatters.A sort of all-dielectric metasurface units with high-transmittivity and entire phase control is proposed,and the performance of metasurface consisting of these units are less affected by the dimensional error of unit.This property reduces the manufacturing requirement,and improves the manufacturability of the metasurfaces.A mehod for the characterization of the polarizing property of optical element is proposed,after deriving the relationship between characteristic parameters and elements of Mueller matrix.The measuring requirement of all-dielectric metasurface-based polarizing beam splitter is analyzed,according to this requirement,the imaging Mueller-matrix ellipsometer in a transmission mode is developed,which provides a experimental technoloty for the characterization of polarizing property.Based on the characteristic method and ellipsometer mentioned above,the experimental analysis for polarizing property of all-dielectric metasurface-based circularly polarizing beam splitter is performed.The application of all-dielectric metasurface-based polarizing beam splitter in angular measurement is experimentally investigated.A method based on polarizing optics for roll-angle measurement is proposed,according to this method,a roll-angle sensor based on all-dielectric metasurface-based polarizing beam splitter is designed,and its theoretical performance is analyzed.Then the prototype of this sensor is developed,and the calibration method of its system parameters is proposed using the imaging Mueller-matrix ellipsometer in a transmission mode.Consequently,the performance of this roll-angle sensor is assessed.The study in design,characterization and application of all-dielectric metasurface-based polarizing beam splitter will provide the theoretical foundations for the practical use of all-dielectric metasurface-based polarizing beam splitter,and will provide the theoretical method and experimental technology for the in-depth understanding of polarizing beam splitter,and will provide new method and novel way for the miniaturization of roll-angle sensor,which will enrich the metrology for roll angle.