Structural Design Of A Novel High-Speed Atomic Force Microscope Head

Since its debut, Atomic Force Microscope(AFM) has emerged as a widespread tool in nanoscale detect and operation field, for it can scan both conductive and non conductive surfaces and can adopt in various environment. In recent years, with the rapid development in the field of nanotechnology research, particularly biological sciences, the demand for high-speed detection is growing, how to improve the time resolution while keep ultra high spatial resolution is one of the hotspots of the current AFM systems research. Currently, most high-speed AFM systems are designed based on sample-scanning mode, unable to detect heavy sample. To this end, a novel AFM head is presented in this article for high speed imaging of heavy sample.The main content of this thesis includes:1, the history and characteristics of AFM systems. the growing needs and state of the art of high-speed AFM are briefly reviewed and presented. Then analyze the limiting factors in high-speed AFM, and propose research content and purpose.2, systematically illustrate the design of AFM head. Analysis the scan mode in AFM system and propose our distinct design, introduce the optical detection module design, analysis the optical detect error inherent in probe scanning AFM system and a unique optical tracking system is proposed for eliminate the error.3, build a high-speed scan head mechanism based on flexure. model of high-speed scanner is discussed in detail. It include selection of piezoelectric ceramics, flexure analysis, material selection, simulation of scanner and inertial balanced design.4, In order to verify the performance of the design of AFM head, serials of experimental measurements were carried out. Experimental results show that the dominant resonances along the Z direction and the Y direction at 17.10 kHz and 5.10 kHz, respectively. The positioning ranges of Z and Y directions are 8.56?m and 7.00?m, respectively.5, In the end, summarize all the work this thesis completed, analysis the problems inherent in the design, and pointed out the future research need to be improved.