Development Of Automatic Measuring Equipment For Micro Displacement Of Piezoelectric Ceremic Slices

The piezoelectric ceramic slice in this paper as a key component of displacement compensator used in laser gyroscope, it has rather high requirements for consistency in the variation of displacement with matching accessories. With manual operation on measuring and matching at present, imperfections in measuring method can’t guarantee the accuracy and lead to low consistency, while mass production shows uncertainty in work efficiency. Therefore, a measuring method with high efficiency and accuracy in the micro displacement of piezoelectric ceramic slices is in urgent need. To solve the problem, this paper developed a new type of automatic measuring equipment for micro displacement of piezoelectric ceramic slices and following job was required in developing process.Firstly, a type of measuring equipment for micro displacement based on the analysis of measuring technology and piezoelectric ceramic slices features was designed, which mainly includes picking module, loading and unloading module, measuring module, with the function of display and man-machine interaction so as to realize auto-test for the micro displacement of piezoelectric ceramic slices. Picking module is made of mechanical arm and linear precision guide, finishing actions of picking up, carrying and placing the slices device with vacuum chuck. Besides, a photoelectric sensor is made to monitor move status of guide rail. Measuring module has a driving voltage provided by ceramic driving power, with a high -accuracy inductive micrometer and a dual-gauge for ovonic measuring. Loading and unloading module includes a loading desk with automatic centering function by pneumatic figure and several unloading desks providing sorting collection.Secondly, finished the scheme for circuit control and gas control, adding a control program taking LabVIEW as platform, which determines general framework and control strategies. Then hardware function partitioning is used to compile control program of each module while related control strategies are applied for interaction among difference modules, realizing the automatic operation of the equipment. The friendly interface for man-machine interaction has easier operation and low technology requirements for operator.The final job is error analysis and precision measurement for the entire equipment from the aspects of measuring principle, kinematic accuracy on micro-displacement platform and installation error. The calculation emphasized on possible factors influencing measuring precision makes sure measuring and kinematic accuracy of the equipment. The experiment data show that the automatic measuring equipment for micro displacement of piezoelectric ceramic slices developed in this paper has high efficiency and accuracy which meet the requirement of micro displacement.