| Micropositioner is an indispensable part for the precision manufacturing technology and nanotechnology. It usually consists of three components, namely micro-driver element, micropositioning stage and control circuit. The main works of this paper include:(1) The mechanics model of flexure hinge is established and the formula for design is obtained. Classification of piezoelectric ceramic components and the analysis of inverse piezoelectric effect are introduced.(2) The flexure hinge based compliant mechanism and a new flexible cantilever based compliant mechanism are studied and compared by using finite element method (FEM). The results show that with the same size and input force, the displacement of new compliant mechanism is three times that of the traditional one while the biggest stress decreases 4 percents. The design formula for new compliant mechanism has fewer parameters and less calculation work. The geometry of the flexible cantilever based one dimension compliant mechanism is optimized to get the biggest output displacement by using orthogonal arrays and analysis variance.(3) Based on the study of one dimension micropositioning stage, the performance of stacked serial, nested serial and parallel two- dimension micropositioning stages are analyzed and compared. The result shows that the parallel two-dimension micropositioning stage is the best choice. Theoretical and finite element simulation analyses are carried out for the parallel two-dimension micropositioning stage.(4) The work principle and characteristics of three displacement sensors are analyzed. Capacitance displacement sensor is selected as the micro-displacement measuring sensor for micropositioner.(5) A control scheme of micropositioner is proposed, two control methods are put forward: PID feedback control with BP neural network modeling in feedforward loopand fuzzy-PI sectionalized multimodal control... |
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