Theoretical And Experimental Study On A Contactless Air Conveyor

With the improvement of science and technology, the demand for semiconductor wafers, solar panel and LCD Panel are rapidly increasing. Because of the brittle crack characteristics of the material, the production process is extremely rigorous. During the process of transport, its surface must be with no damage and pollution. Because the traditional way of handling is directly contact with the product surface, it's very easy to damage the products and affect the quality of the product. Therefore, completely non-contact type of transport is the most ideal way of handling, which is driven by gas viscous forces. In order to achieve complete noncontact transport, the film provides holding power. So it has the following advantages: clean, pollution-free, no heat, not magnetic, and little impact on the surface.Nowadays, the mode of non-contact transport is completely non-contact. Because it requires the mechanism to provide additional power and to limit position. The typical representatives of the transportation are device for large glass substrates. The porous materials are the throttle element, which plays a supporting role, and the rollers are powered devices. The research on completely non-contact mode of transport is just in the laboratory, so there are many problems to solve, such as lack of basic theory research, fundamental flow analysis and cohesive force influencing factors analysis.In order to guide the design of based on the viscous force design of non-contact transmission system, this topic is based on theoretical analysis, mathematical modeling, numerical simulation and experimental validation of a combination of methods and the characteristics of the air transport makes a systematic and in-depth study.The main content of this topic includes the following sections:1. According to the theory models of Reynolds equation coupled to the incompressible and Navier-Stokes equations and the analysis of characteristics of suspension height under fixed gas pressure, then establishing mathematical model that reflects its discipline, and verifying the correctness of the mathematical model through fluent fluid software and related experiment.2. Referring to non-dominated sorting genetic algorithm(NSGA-II) as a multi-objective optimization design method, using the structural parameters of the drive unit as independent variable, and using the reduce of gas consumption and enhance of the cohesive force of the system as the optimization goal, then designing aerostatic guide way unit obtained set of Pareto optimal solutions, finally analyzing influence of various parameters on performance of aerostatic guide way.3. Designing gas pressure distribution measurement test and the viscous force measurement test. Then knowing the influence of various parameters on performance of aerostatic guide way by experiment, finally determining the weight of the influence of different parameters, which is beneficial to model updating and can be as a theoretical support.4. Designing non-contact transportation control system based on the viscous force built air transportation systems test devices. The feasibility of the design scheme of transport system based on the gas viscosity force is verified through experiments.This research based on optimization conclusions completed a completely non-contact air bearing transport system of innovative design, to a certain extent, which is useful for future optimization design of non-contact transportation system to provides a theoretical foundation and methodology.