Research On The Fabrication And Controlling Of Profiles Of Microlens Arrays Based On Mechanical Indentation Technology

With the development of science and technology, miniaturization and intellectualize have become the mainly development direction of modern industrial technology. The fabrication method of micro-optics components is the core technology of micro-optics industry. So, the microlens array with miniaturization and low cost has attracted lots of attention, and its application in aerospace, sensing, national defense and medicine and the like will creat great influence.By adapting a new method which is based the mechanical indentation to fabricate the concave microlens arrays, the precise fabrication of nanoscale microlens array will be realized. The glass material which has well mechanical strength and optical properties is the most commonly used material of mirror and lens including microlens. But with the fragility, it's difficult to fabricate the smooth flawless surface using the traditional method. So the combination of "mechanical indentation technology " and "locally enhanced dissolution rate in densification area" is adapted to produce the concave microlens arrays.By researching the indentation mechanism of fragile material to determine the range of densification area; the glass sample will be annealed to verify the hypothesis that appearance of densification area is the mainly cause of locally enhanced dissolution rate. The parameters which will affect the final profile are to be researched, including the dissolution time, the maximum load, the different type of indenter; the mathematical model of microlens has been found, also the time to reach the expected microlens lens profile has been established. The last but the least, the optical experiment has been implemented by using the optic simulation software named Zemax.Compared with the traditional ways to produce microlens array, this method has plenty of advantages, for instance the simple process, the low costs, high efficiency, the more controlled microlens profile, more precise etc. This method provides a new vision to fabricate concave microlens arrays, and will provide support to the Micro-optics technology.