| Optical microscopes are precision targeting instruments applied to the tiny structures observation and non-contact measurement. This paper designed a photoelectric microscope system applied in the abbe comparator which can measure glass or metal lined engraved ruler with high precision.On the basis of Analyzing present situations and development of the abbe comparator, the abbe comparator and photoelectric microscope working principle was described, and the overall design of the photoelectric microscope applied in the abbe comparator was put forward. This paper mainly focuses on the design of the optical system of the optical microscopes. the photoelectric microscope design parameters according to the requirement were calculated; the objective lens system, the observing system and the lighting system were designed by ZEMAX application software, and also the tolerance analysis. The high sensitivity photomultiplier tube was selected as the photoelectric conversion element with the design of the preamplifier circuit; the factors affecting of the optical microscopy targeting accuracy was analyzed, and the solutions were proposed. Finally, by experiment optical microscopy aiming accuracy is 0.03μm. |
