| With the maturity of micro-nano technology,more and more sophisticated micro devices are produced and manufactured.For these sophisticated,fragile small devices,precision assembly is not the task of manual assembly can be done,therefore,for the precision assembly of small devices has become the industry’s focus.In this paper,the main research contents of the vacuum device are as follows:Firstly,the whole technology of micro-assembly system,the function of each system and the cooperation between them are studied.The assembly method of improving the assembly precision is put forward.Then the high accuracy of the whole assembly system is analyzed.Secondly,the positioning accuracy of the X and Y coordinate axes is studied on the motion coordinate axis of the micro assembly system,and the motion accuracy of the system is improved by means of error compensation.The XY axis interpolation motion is researched and experimented,and the angle compensation of XY is carried out,and the precision of the system is obviously improved.The accuracy of the two forms of motion is analyzed,and the optimal path method is selected to achieve high precision control.In order to improve the robustness of the micro-assembly system,the micro-parts are sensitive to the external environment during the assembly process.In order to improve the robustness of the micro-parts assembly system,the micro-parts produced in the process of relatively small Gripper dislocations were analyzed,and the corresponding optimization method was put forward.In order to make the system achieve higher recognition accuracy and feature extraction precision,the external parameters of the camera core part are corrected firstly,and then the image processing technology is proposed.A method based on template area dichotomy is proposed to automatically select the threshold value.Compared with the traditional automatic threshold selection method,this method can achieve better recognition and feature extraction precision,and develop the optimal balance of the extracted device features Point feature positioning,so that the accuracy of the assembly system to meet the requirements of micron-level assembly.Finally,the assembling precision and measurement principle of micro-device assembly are introduced,and the machine vision system is applied to the detection of the assembly result of the device.A method of assembly precision measurement based on the feature point feature line position is presented.The position and angle after assembly are measured.The experimental results show that the method can measure the assembly precision of the device quickly and accurately,and the measurement accuracy can reach the micron level. |