Modeling And Simulation Of Magnetic Levitation Position Platform Based On MAXWELL

The precision positioning platform based on magnetic levitation technology can completely eliminate the shortcomings such as friction,wear and noise caused by component contact of traditional positioning platform,and has a series of advantages of low power consumption,fast response speed and high speed.Therefore,it has played an important role especially in the field of microelectronics manufacturing technology,but also in high-speed,high-precision movement of the positioning platform.Compared with foreign research on maglev positioning platform,we have also carried out relevant research and a batch of gratifying achievements.However,with the rapid development of high-tech applications in microelectronics manufacturing,requirements for high precision and quick response positioning platform are getting higher and higher.In this context,we carried out simulation study on the electromagnetic characteristics of the TU-type multi-degree magnetic suspension positioning platform with MAXWELL3 D simulation software.The main contents are as follows:1,According to the basic theory of electromagnetic field,the basic working principle of Maglev positioning platform is analyzed,and the principle structure of LL type structure maglev positioning platform and TU type multi-degree maglev positioning platform are contrasted and analyzed,and the magnetism of multi-Road characteristics and force characteristics.According to the results of magnetic circuit analysis,combined with the analysis of various magnetic materials,we have determined the size and material of TU-type multi-level magnetic suspension positioning platform with reference to the existing data.Besides,the initially determination of the coil current in the simulation modelhas also been implemented.3.Using MAXWELL3 D to analyze the static magnetic field of the platform,the variation law of the magnetic field distribution of the whole platform is studied when the relative position of the T-type mover and the U-type stator is changed in the platform structure.Besides the influence of the air gap height between the T-type mover and the U-on the magnetic field of the whole platform is alse studied.The influence of coil position on the levitation force is analyzed by MAXWELL3 D simulation software.The influence of current on the suspension force of the suspension is also analyzed...