Research And Design Of Maglev Platform Based On Hybrid Repulsion

Magnetic levitation technology is a typical mechatronics technology that integrates multiple disciplines such as electromagnetism,electronic technology,and control engineering.With its advantages of high positioning accuracy,fast response speed,no friction,and compatibility with vacuum environment,the magnetic levitation micro-positioning platform has strong application potential in many high-tech fields such as integrated circuits and micro electro mechanical system processing and manufacturing,and has been widely concerned by academia and industry.The research on magnetic levitation platform technology will help to enhance the crossover and penetration between various disciplines,and promote the development and application of magnetic levitation micro-movement platform,which has very important theoretical and practical significance.Based on the passive force between permanent magnets to reduce the design idea of active control in the vertical direction,this paper proposes a structural design of a hybrid repulsion maglev platform.Its characteristic is that the permanent magnet provides the suspension force of the platform,and the electromagnetic coil provides the driving force in the horizontal direction,so as to reduce the vertical direction control,thereby reducing the number of coils responsible for active suspension.The main work completed and the specific contents are as follows:（1）From the mechanical structure,sensor system,control system and power amplifier system,the overall design scheme of the hybrid repulsion maglev platform system is proposed.At the same time,the three-dimensional finite element simulation software is used to simulate the magnetic field of the different structures of the stator and mover.（2）Deeply study the nonlinear characteristics of the magnetic force in the maglev platform system,and derive the analytical expression of the magnetic scalar potential based on the magnetic charge model,and the force of the float permanent magnet in the magnetic field is accurately calculated,the results are the same as the finite element simulation and experimental measurements.And explore the force law of the float permanent magnet at different suspension heights,realize the force decoupling of the float permanent magnet in the vertical direction and the horizontal direction,which proves the feasibility of the strategy of reducing the vertical direction control with the stability of the passive levitation force.（3）The dynamic modeling of the float permanent magnet is carried out,the closed-loop control of stable suspension movement is designed,the overall mathematical model of the system is established,and the stability of the system is verified by simulation.Then,based on the overall design scheme and mathematical model of the system,the hardware circuit topology structure of each module is built,the digital controller is designed,and the corresponding control algorithm is written.Finally,an experimental prototype is built,which can achieve stable static suspension and good dynamic movement performance.The experimental results verify the feasibility of the design scheme based on the hybrid repulsion type maglev platform.