| With the improvement of living standards,the appearance of the surface of the article put forward higher requirements,in view of this,the surface of metal vacuum coating has been widely used in all kinds of plastic,ceramic,glass,wax,wood and other products,so the vacuum coating technology in the future there will be more broad prospects will open up a broader market.Nowadays,all countries in the world pay more and more attention to the environmental problems,pay great attention to the protection of the natural environment,and have issued many strict environmental protection laws and regulations.In the past,the pollution of electroplating technology is more serious,so vacuum coating technology is very necessary.In industrial applications,most of the materials used today are pure silicon and other crystalline semiconductors.Nano electronic devices may be based on organic or inorganic composite crystal film as the main principle,for the purity of higher requirements,the structure of more perfect.However,the traditional method of film preparation is difficult to meet the requirements in the manufacturing environment and manufacturing process.Therefore,the clean environment and process of vacuum preparation will play a greater role in processing and assembling nano electronic devices.In China put forward their own background of "China manufacturing 2025"under the surface and thin film science and technology,microelectronics,nanotechnology will develop more rapidly,the vacuum coating machine important traditional vacuum coating technology status will be more for environmental pollution,high power consumption,the operator's body is very dangerous.Vacuum coating machine in this paper is very good to improve these shortcomings.In this paper,the structural characteristics,structural design,static stress analysis,thermal structure coupling analysis and modal analysis of the vacuum coating machine are introduced in detail.The main contents are as follows:1.This paper introduces the structure of vacuum chamber of vacuum coating machine,and expounds the working principle of vacuum coating machine in detail,which provides a way for us to understand the structure of vacuum coating machine deeply.The three-dimensional parametric model of each part of the vacuum coating machine is established by using Solidworks software,and then the virtual assembly of the vacuum coating machine is added and simplified by adding constraints.This paper on the basis of previous further design the double water system of vacuum coating machine,the vacuum coating machine at work and greatly improve the work efficiency,but also reduces the welding workload,reduce power consumption,thereby reducing the pollution and improve the economic performance of vacuum coating machine.After that,the selection of vacuum pump unit is carried out according to the actual work requirements,and the vacuum motor is selected.2.The finite element analysis of the coating machine is carried out by using ANSYS Workbench software,and the stress and strain nephogram and displacement diagram of the unit and the node are obtained.The following conclusions can be obtained.The side valve vacuum coating machine has obvious changes,a concave trend is obvious,is the maximum strain of the vacuum chamber,the maximum deformation of the vacuum chamber is 3.4897mm,the maximum equivalent stress is 187MPa,the effects of varying the maximum value of 0.0010m/m,but also in the machining part is vacuum room,through the analysis found that the deformation is greater than the vacuum vacuum flapper valve design manual of the maximum allowable displacement value is 0.5mm,so it is necessary to improve the structure of vacuum flapper valve,the improved method has two kinds,respectively adding stiffened plate and increasing the wall thickness of the improved method,the two method is the maximum displacement the amount of vacuum coating machine high air baffle valve is reduced to 0.36mm.Meet the requirements of vacuum coating machine.Comprehensive consideration is given to the improved method of applying stiffeners,because the improved method of increasing wall thickness will increase the manufacturing cost and manufacturing difficulty of the valve body.At the same time will increase the amount of welding,increasing pollution.Through the analysis of the vacuum chamber,it can be found that there is deformation at the joint of the flange and the barrel wall,the size is 0.1mm,the deformation is very small,and the quality of the workpiece is very little affected.By static stress analysis,the vacuum chamber meets the requirements of the work.3.The thermal structure analysis of vacuum coating machine is the thermal structure coupling analysis based on the theoretical analysis.The temperature field and stress field of the vacuum coating machine are mainly obtained.Different from the independent analysis of temperature field and static stress field,the thermal structure coupling analysis combines the former two with the change of temperature and stress at the same time of the vacuum coating machine.This also conforms to the actual work in the situation,in the actual work cannot have the individual field existence,all is the result under the multi physical field function.Through the analysis of this chapter can be seen in the dual role of stress field and temperature field under the vacuum coating machine deformation has further increased and improved the structure,the thermal structure coupling analysis showed that the displacement of the top flange and the barrel body of the vacuum chamber is large and needs to be improved to enhance the stiffness the.In the vacuum chamber top flange part,according to the requirements of the vacuum design manual,using the improved method of adding reinforcement plate,so that the displacement of the vacuum chamber is further reduced to about 0.4mm,and reached the work requirements.As for the barrel of the vacuum chamber,the problem of rigidity is solved because the design of the runner is increased and two birds with one stone are solved.After the discovery of the temperature in vacuum chamber,a barrel body and a flange of the source interface is very high for the operating personnel security threat analysis through the steady thermal and cooling system of the vacuum chamber is designed,the design of the cooling system of the vacuum chamber is the vacuum coating machine when the temperature reached the processing requirements,to further improve the vacuum coating the efficiency of the machine.4.In this paper,using the finite element method,finite element analysis software ANSYS was used to carry out the modal analysis of vacuum coating machine,vibration vibration vacuum coating machine in the process of work mainly from the vacuum of the stepper motor,and the first six order modal natural frequency and vibration mode,the analysis result shows that the vibration form of vacuum coating machine to plate bending,the reserved connection part of the mouth between the two sides of the valve body,the connecting part of the displacement between the two ports in the main body of the above is relatively large,it shows that the rigid part is relatively weak,in the future design can strengthen the wall thickness to improve rigidity.In the vacuum chamber,the vibration displacement of the top of the vacuum chamber is similar to that at the junction of the flange and the barrel wall.It can increase the rigidity and reduce the deformation through the stiffened plate.The analysis shows that the first order vibration frequency of the vacuum coating machine is very high,and the vibration frequency of the vacuum stepping motor is very low,and the two are far from resonance. |
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