Numerical Research On Pumping Characteristics And Rotor Structure Of Vortex Vacuum Pump

With the development of industry,vacuum technology in various sectors Is widely applied。For the vacuum pump,people have been looking for possible instead of high vacuum unit and is capable of directly discharged atmospheric vacuum dry pump。Now these dry pumps have been in use in some areas,such as the semiconductor industry,analysis of industry,and the electronics industry.In this paper,with a particular vertical air pump,study the composition and structure of the dry pump and an internal flow analysis for its vortex stage rotor.In addition,due to the high rotational speed of the vacuum pump,This article also the conducted heat-structural coupling analysis and high-speed vibration analysis.According to the analysis of to improve the structure of the pump.For the current level vortex pumping structure,now studied theory and design is not very mature.Therefore it is necessary to the vortex level exhaust theory do deeper research.Use the results to guide the future of such a dry pump designed and development.This paper introduces the principle of vortex pump and internal flow theory;Use Solidworks software conducted vortex pump flow area three-dimensional modeling,Use ICEM CFD software mesh vortex pump internal flow area of structural;Using k-εturbulence model,using CFX software for three-dimensional turbulent flow field inside different design parameters for numerical analysis.Study the flow pattern inside the vortex level exhaust structure,grasp the distribution of temperature field,velocity field inside vortex purmp flow area.;By heat-structure coupling analysis of rotor shaft;Determined rotor maximum deformation and cooling is applied in the program where the rotor shaft;Use vibration analysis,analyze the impact of the rotor shaft geometry change the vibration frequency of the rotor shaft,the rotor shaft geometry is determined based on simulation results.By analysis results of numerical simulation convection within the field,the pumping speed of the pump is maximum when rotor blades is 45;When the relative size of the blade is about 0.45,pumping speed is maximum,when the shape of the rotor blade is V-shaped,pump speed is maximum.By the heat-structure coupling analysis of rotor shaft obtained the limit maximum thermal deformation of rotor is 0.15mm in the end of the rotor shaft.Through the modal analysis of the rotor shaft and the rotorresonance frequency of the rotor shaft is about 500hz.This resonance range should be avoided when we designed.The natural frequency of the rotor blade is far higher than the rotation frequency of the rotor shaft,thus resonance does not occur.