| As an important means of ultra-precision detection technology,white-light vertical scanning interferometry has the characteristics of non-destructive and high resolution,and it is widely used in the fields of step height measurement,surface roughness measurement and film thickness measurement.In recent years,a new research hotspot has developed for the theory and system research of white-light vertical scanning interferometry in specific application fields.In this paper,the aim is to develop a set of white-light vertical scanning interferometer system whit high precision and high reliability.The system includes white-light vertical scanning interferometer,control box,the slave computer software and the upper-computer software.The main research content is as follows:1.Complete the analysis of the ultra-precision non-destructive testing technology,especially the white-light vertical scanning interferometry.After pointing out the processing algorithm is a kind of compute-intensive task,then the multicore and multithread technology is discussed.2.Complete the requirements analysis of the system from three aspects: functional requirements,performance requirements and operational requirements,and give the overall design of the hardware system and software system.In the software system design,using the modular design method to ensure the stability,scalability and maintainability of the software system.3.Complete a detailed analysis of the software system design,including the slave computer software and the upper-computer software’s business logic design,the GUI design and layout with high scalability and high interactive.Creatively proposed a multicore multithread optimization method for interference signal resolution on TILEncore-Gx36.4.Complete the hardware system and software system implementation with the guide of the detailed design.In the process of the software system realization,a number of new and efficient tools are used to improve the efficiency of software development.At the same time,a point cloud flatting method based on PCL and an automatic height evaluation algorithm based on OpenCV are designed.5.Complete a synchronous scanning method,which based on the real-time effectivenessanalysis of the interference signal,for expanding the application fields of the system and solving the reliability problem in the measurement of vertical large-scale scanning.The influence of the minimum sampling interval length on the solution of different processing methods is studied,and the criterion of signal effectiveness is proposed.On this basis,three steps of real-time interference signal recognition and fast interference signal extraction algorithm are given.Finally,multicore multithread technology is used to realize the synchronization strategy.6.Complete the standard height evaluation experiments,the results show that the system meets all the requirements and then ensure the validity and authority of the measurement data of the system.At the same time,a large number of measurement experiments are carried out,which proves that the system has the characteristics of high stability.Finally,it is proved that synchronous scanning method based on the real-time signal effectiveness analysis can effectively improve the reliability of the results in the vertical large-scale measurement.In the experiment,this method effectively eliminates the invalid data by 9.01% of the total measured area and reduce the total running time of 49.02% by improving the CPU utilization. |
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