| The cylindrical mirror analyzer(CMA)is a type of energy analyzer appeared in the 1950 s,which has definite advantages,e.g.,high energy resolution,high transmission rate(or transmittance)and simple structure.It was applied mainly for the Auger electron spectroscopy and X-ray photoelectron spectrometer in the past.In this thesis,a CMA for high energy scattered ions is designed by simulation.The scattered ions produced in ion-atom collisions enter the CMA at a given scattered angle and their charge states are analyzed by a coaxial electrostatic field.Then,the scattered ions are detected by a one-dimensional position sensitive detector(PSD).Finally,the charge state distribution of scattered ions can be obtained through the position spectrum.Such kind of CMA can collect all the scattered ions for a given scattered angle.This contributes to a high efficiency in multiple coincidence measurement.Mainly including:(1)based on physical and mathematical principles,a program is written to simulate the motion of ions with different energies,charges and scattered angles in CMA,and the optimum parameters of CMA are determined;(2)simulate the motion and position distributions of scattered ions in CMA by the SIMION program;obtain the optimum position of the detector and the relationships of various parameters;(3)use Autodesk Inventor to complete the mechanical design of CMA. |
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