| Fast steering mirror(FSM) is a kind of optical device it’s used to control and drive the mirror deflection according to input signal. It is mainly used to realize the adjustment of the light path fast and accurately. Because piezoelectric ceramic actuators(PCSA) have advantages of large output force, small volume, high resolution, and fast response speed, FSMs using piezoelectric ceramic actuators(PCSA) are particularly suitable for high precision, high speed, and high integration applications. They have broad application prospects in compensation of adaptive optics, beam tracking, and pointing, image stabilization, laser scanning, acquisition, tracking, targeting system and space optical communication. At present, the problem of the measurement of FSM’s deflection angle is still lack of effective solutions. It is the inevitable requirement and premise for FSM applying to high accuracy, fast image stabilization, target acquisition and beam pointing to research and develop a kind of high precision dynamic deflection angle measurement method and to establish the corresponding measurement system with integrated into the FSM to form a closed loop control system which can realize the feedback control with high precision.In this thesis, a piezoelectric FSM is designed. A dynamic deflection angle measurement method based on angle position sensitive detector is realized to solve the problem of deflection angle measurement and measuring system is developed. This thesis developed a dynamic deflection angle measurement system prototype and established corresponding system test. The results of the theoretical analysis and the experimental results show that the dynamic deflection angle measurement method and system can measure the angle with the maximum value of 3 degree.The main contents of this thesis are as follows:①Piezoelectric fast steering mirror with large excursion angle is designed to solve the problem of a piezoelectric FSM with large excursion angle and the driving circuit and controller for piezoelectric FSM system are analyzed.② This thesis presents a method for the deflection measurement of the angle of FSM, the measurement principle of FSM deflection angle measurement system is analyzed and the relationship between the deflection angle and the spot in the sensitive area of the displacement is established. The hardware and software modules of the piezoelectric FSM deflection angle measurement system are presented. On these bases, the measurement range, the resolution of the system and the error characteristics are analyzed, which proves the feasibility of measuring method of piezoelectric FSM deflection angle.③ In this thesis, through selecting the light source, lens, and position sensitive detector PSD, the whole optical system is designed and developed based on the principle of angle measurement of FSM. According to the characteristics of the position sensitive detector, the signal processing circuit is designed to process the output of the PSD. The software module of the measurement system is developed.④ Based on the structure of the angle measurement system of piezoelectric FSMs with large excursion angle, the linearity test of the PSD, the accuracy test of the angle measurement system, the measurement range and resolution test have been conducted and the results shows that the linearity is better than 95%, the ripple is less than 0.086 degrees, the angle measurement accuracy is less than 0.055 degrees, the range of the measuring angle is greater than 3 degrees, and the resolution is better than 0.043 degree. In a word, the angle measuring system of the piezoelectric FSM with large angle has the advantages of small ripple, large measuring range, high accuracy and resolution. The measurement for the large angle deflection of the piezoelectric FSM has been achieved.The research work in this thesis lays a foundation for measuring large angle deflection of the piezoelectric FSM, which will promote the extensive application of the piezoelectric FSM. |
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