Research On 2DOF Piezoelectric Micro Motion Platform

The piezoelectric micro-displacement platform is the structure with high precision,no friction,simple control method and compact structure,and is applied in fields like precision and ultra precision actuating,positioning and machining etc.In order to meet the requirement of more rapid response,higher overloading ability,higher power-volume ratio in the aerospace optical precision drive fields,this paper proposes a novel two-dimensional piezoelectric actuator with high precision,fast response,high resolution,two-way symmetrical output characteristics based on triangle amplification principle.Concrete studies are as follows:The current development situation of the image stabilization technology and actuators is presented,and the merits and drawbacks of them are discussed.The advantages of piezoelectric micro-displacement platform in the optical image stabilization drive are pointed out,as well as the goal of this paper: research of 2D piezoelectric micro-diaplacement platform.The basic characteristics of the piezoelectric materials are introduced,as well as the analysis of modeling,electromechanical and dynamic characteristics of laminated piezoelectric ceramic;basic mechanical properties are tested and parameters of the laminated piezoelectric ceramic are calibrated.To improving the stroke and the bidirectional output performance,a piezoelectric microdisplacement actuator is proposed.The theoretical model is established,and the parameters are optimized by FEA;Experimental results show that: Stroke of the actuator reaches to 105?m,and the displacement resolution is 100 nm.The step response is within several milliseconds,and the actuator has two-way symmetrical output performance.Stiffness of the actuator has no more than 22.6% difference between the experimental and calculated values at the moving direction.A new 2D piezoelectric micro-displacement platform is proposed,based on 1D actuator and flexible parallelogram mechanism.The static and dynamic theoretical model is established.Optimization of parameters is carried on by maximizing the static and dynamic theoretical charactors as the optimization goal by FEA;the experiment proves the validity of the theretical model.Actuation stroke in two directions reaches to 41.6?m,42.9?m with little coupled displacement,no more than 11.7% of the stroke,with milliseconds step response time and 50 nm displacement resolution.