A Research On Small-size Radio Frequency Glow Discharge Spectrum Analysis System

Glow discharge optical emission spectrograph can be used for the analysis of the material composition on the surface of the material.It can be used to analyze the solid samples directly,and to analyze the surface of the sample by layer by layer.In recent years,it has been widely used in the field of metal coating,superhard coating and organic coating,it provides an effective analysis method for the analysis of surface composition,production process improvement and product quality inspection.Therefore,the research on the technology and application of glow discharge spectrometer is a hotspot in the field of analytical instruments.It is an important research direction in the development of the spectrum analysis instrument.The miniature spectrometer can make up for the shortcomings of the traditional large-scale instruments.In this paper,a kind of small-size radio frequency glow discharge spectrum analysis system is studied,using CCD portable multi-channel spectrometer detector instead of the traditional optical detection system,glow discharge excitation source and the experimental platform for CCD detector are designed,which simplifies the structure of glow discharge spectrometer,reduces the size of the instrument.It can be used in many kinds of occasions,such as small analytical laboratory,material quality inspection department,school research room and so on.In this paper,the experimental platform of the radio frequency glow spectrum analysis system is designed and completed.Including glow discharge excitation source,RF power supply system,CCD spectrum detection system,sample loading device and vacuum system.The design scheme of glow discharge excitation source is introduced in detail,and the structural parameters are given.This paper introduces the principle and debugging method of RF power supply system.The sample loading device and vacuum system are designed.The distance between the sample and the end face of the anode cylinder was optimized,and the experimental conditions such as RF power and discharge pressure were determined.This system has been successfully applied to the sputtering of three different matrix metal samples,which were galvanized plate,iron-based bulk sample and copper based bulk sample,and good sputtering pits were obtained.The spectral signals were collected and analyzed by CCD spectral detector of Avantes.Zn,Fe,Cu,Al,P elements were detected in thesamples of galvanized steel plate,and Al,Fe,Cu,C elements were detected in the iron-based bulk sample,and the Cu,Fe,Mg elements were detected in the copper based bulk sample.The detection elements and spectral intensity data of different samples are given,and the qualitative analysis of three kinds of metal samples is carried out.The influence of RF power and argon pressure on the excitation effect of glow discharge system is discussed,and the variation curves of Fe and Cu elements of the iron-based bulk sample with RF power and argon pressure are given.