Study On Optical Components Surface Defect Composition Measurement Technology Based On Micro-LIBS

With the development of society,precision optical components and optical systems are used widely in multiple domains.However,the performance of the optical components and optical systems is affected by optical surface defects and trace impurity elements seriously.The effective detection of elemental composition of optical surface defects,and distribution of trace impurity elements,can provide good reference for improving the precision machining technique of optical components.In this dissertation,the surface defect measurement techniques and laser induced breakdown spectroscopy technique are analyzed.To overcome the disadvantages of element detection technology,an experimental setup based on surface defect measurement techniques and laser induced breakdown spectroscopy technique is designed and developed,which is used for detecting element compositions of optical components surface defects and distribution of trace impurity elements.The experimental results show that the experimental setup can effectively detect the element compositions of optical components surface defects,and the distribution of trace impurity elements of optical components.