Precision Model And Experimental Research For Small Optical Aspheric Mold

Currently,the technology of error compensation during the forming grinding process of ultraprecise small diameter aspheric is mainly machined through practice at home and abroad,which cannot be explained by correlative theory and the detailed results cannot be obtained either.Therefore,the systematic analyses for the error compensation theory of ultraprecise grinding turn out to be much more important.Moreover,the accuracy demand of form grinding is very high(PV?200 nm)when the mini-ultraprecise mould used for manufacturing ultraprecise aspheric element on a large scale is processed.Therefore,controlling the errors and analyzing the surface accuracy in the grinding stage is essential to improve the efficiency of surface grinding of small diameter Aspheric.To solve these problems,the error modeling,accuracy analysis and experimental verification has been researched for ASP005P Aspheric Nanogrinder.Aiming to improve the grinding precision of ultraprecise small diameter aspheric,several aspects are studied,including:(1)Based on rigid body kinematics theory,coordinate transformation and the results of error analysis for the nanogrinder,the general error model of the nanogrinder is built according to high precision structural characteristics of ASP005P Aspheric Nanogrinder.Then based on the specific accuracy index of the ASP005P Aspheric Nanogrinder,combined with the practical equation of function equation curve of grinding,neglecting the second order small quantities,the small diameter Aspheric error model is built.(2)Based of the least-square residual method for shape error of the curve,their propagation coefficients to shape error are calculated by MATLAB,the result of aspheric error model analysis shows straightness error of x-direction and arc radii error are main errors that effect surface error distribution.Then the simulation is carried out to get intuitionistic impression,which obtained the error value of the optimal solution and provide data support for compensation experiment.(3)Based on ASP005P ultraprecise Aspheric Nanogrinder,straightness error of x-direction and y-direction is chosen to be technics parameter for the verification test.Then the differences between the experimental data and simulation result is compared to verify the accuracy of the error model and the simulation program.