Design And Implementation Of High-Precision MEMS Angular Rate Measurement System

With the emergence of various types of motors equipment,which greatly inspirring the MEMS gyroscope market demand,there are many factors affecting the accuracy of MEMS gyroscope,and our country has great lack in precise parts processing,it is also one of the reasons for the lagging development of MEMS gyroscope in our country.The vast majority of MEMS devices on the market in China is monopolied by foreign countries.Therefore this topic plans to invent a high accuracy of three-axis angular rate gyro,at the same time,to explore the main factors affecting the accuracy of MEMS gyroscope which involving the system error,random error and temperature error.In order to solve the problems of MEMS gyro accuracy affected,this topic plans to design the periphery of the MEMS gyroscope signal processing hardware,software system,and the corresponding algorithm design.The specific content is as follows:First of all,In the design of hardware circuit and the collection procedures.Then combining three angular rate sensor into triaxial MEMS gyroscope,and designing the corresponding data collection and processing procedures,finally sending the data package in the form of 422 agreement.Secondly,The calibration and temperature compensation.the combination of three-axis gyroscope can't satisfy the orthogonality of hardware,lately using three axis turntable calibration experiments realizes the orthogonality of the three axis,and writing the corresponding orthogonal transformation program.Because of the influence of temperature on the MEMS sensor is larger,the temperature compensation is necessary,therefore,using oven carries to carry on high and low temperature test,depending on the experimental data collection and processing,completes the implementation of the corresponding temperature compensation algorithm.Finally,to research the filtering noise cancellation method for Measurement system.Basing on the analysis of advantages and disadvantages of Various filtering methods,analyzes the feasibility of the filter algorithm and decides to adopt the wavelet filtering algorithm.This paper expounds the basic theory of wavelet transform,and introduces the filtering method based on wavelet transform algorithm.Using experimental data to filter processing,write the corresponding algorithm procedures,and indicators of measuring system for testing and comparing.