Research On Manufacturing Technology Of TR Modules Shell Of Silicon-aluminum Alloy

Until now,the maturity of anti-guidance technology is much less than that of guidance technology for guidance radar in MMW(Millimeter Wave),and most countries cannot intercept missiles effectively.As a result,the MMW guided missile is more and more taken seriously.And,the phased array seeker has become the main development direction for modern radars,due to its beam agility capability and multiple targets tracking capability.The TR modules are the key parts of MMW phased array seeker,and involve a mass of manufacturing technology including precision machining of the module shell,circuit process of the composite microstrip,circuit process of the ceramic thin films,integrated manufacturing technology of LTCC,surface treatment technology,micro-assembly process,packaging process and so on.The precision machining is the key process to realize the technical indicators of the MMW phased array.Besides,the thermal failure may happen for the chips(i.e.LTCC or GaAs chips)with high heat emission,and thus the other key process is the solution for the thermal matching between the TR module shell and the chips with high heat.The characteristics of the TR module shell include complicated structure,high accuracy requirements,low thermal expansion coefficient,high thermal conductivity,high electrical conductivity,gas seal requirements and so on,due to the requirements of radar performance,reliability and environmental adaptability.This study focuses on the design and manufacture of the TR module shell with low thermal expansion coefficient and high thermal conductivity,which relies on a MMW phased array seeker project in order to solve the thermal failure of the chips with high heat emission.Through the application of silicon-aluminum alloy as the module shell of the TR module,this study improves the design and the manufacture process of the TR module shell,and obtains a TR structure with partial gas seal capability.The application of silicon-aluminum alloy has become much mature,with the rapid development of its preparation and manufacture technology.The process design and manufacture technology of the MMW TR module shell can also be applied in other projects of MMW phased array seeker.