Research On Flexible Piezoelectric Energy Harvester Of PMN-PT Single Crystal

With the development of electronic technology,various portable electronic devices greatly improve people's living standards and promote social and economic development.At the same time,they have also put forward new requirements for the supply of energy.It is of great significance to develop clean and highly efficient energy sources.The mechanical energy in the environment is everywhere,and the flexible piezoelectric energy harvester can use piezoelectric effect to convert mechanical energy into electrical energy for power supply.The flexible piezoelectric energy harvester also has the advantages of thinness,high efficiency,biocompatibility,etc.So it has a wide application prospects in the electronic field and biomedical field.Through the analysis of piezoelectric theory and piezoelectric materials,lead-based composite perovskite structure relaxation ferroelectric single crystal lead magnesium niobate-lead titanate?1-x?[Pb(Mg_1/3Nb_2/3)O₃]-x[PbTiO₃]?PMN-PT?is used as experimental material,which is formed of a solid solution of relaxor ferroelectric Pb(Mg_1/3Nb_2/3)O₃ and ferroelectric PbTiO₃.It has excellent ferroelectricity,piezoelectricity,pyroelectricity,and dielectricity at the morphotropic phase boundary?MPB?and is widely used in energy harvesters,sensors,memory,and other fields.The finite element multiphysics analysis software COMSOL was used to establish the geometric model of the flexible piezoelectric energy harvester.The voltage output of the PMN-PT and PZT under the interdigitated electrode structure was analyzed and compared.The voltage output of the interdigitated electrodes and metal-insulator-metal?MIM?electrodes of the PMN-PT material was analyzed.The voltage output at different interdigitated electrode spacing was studied.Finally the interdigitated structure is used,and the electrode width and electrode spacing are both 100?m.The MEMS processing process is used to complete the device manufacturing.The interdigitated electrodes are prepared using a lithographic development method.The PMN-PT single crystal was thinned to 20?m by chemical mechanical polishing?CMP?technology.The PMN-PT single crystal film was transferred to a flexible substrate PET and then the flexible device was manufactured.A test platform of flexible piezoelectric energy harvester was built independently.The output voltage and current of the device were tested.The experimental results showed that the output voltage is 13.5V and the output current is 10.2?A.