Algorithm Research Of Silicon Micromachined Gyro Digital Measurement And Control System

At present,the silicon micromechanical gyroscope has smaller volume,higher performance,lower power consumption and increased intelligence.The bias stability of domestic silicon micro gyroscopes are better than 10°/h in the lab environment,but the environmental suitability of the gyroscope needs to be improved under vibration and temperature varying environment.This paper regards the silicon micromechanical gyroscope designed by the research group as the research object.In order to reduce the temperature sensitivity of the silicon micro gyroscope,a completely digital measurement and control system for the silicon micro gyroscope has been accomplished.First of all,the overall scheme has been determined from the principle of the close-loop drive control and detection circuit algorithm,the basic parameters of digital signal processing and the realization carrier of the algorithm.Secondly,the system-level design has been put forward for the algorithm of the closed-loop drive control and detection circuit.Based on SIMULINK,a simulation tool of MATLAB,a model of the close-loop phase control and amplitude control has been established.The influence of the phase control precision on the measurement and control system has been analyzed.The phase compensation method based on the delay module of the phase-locked loop has been put forward,and the phase control accuracy is 0.065°.The reasonable design for loop parameters has been finished through the linearization of the close-loop phase control and amplitude control models.The driving frequency has been used to be the characterization of temperature.And then,a high-precision temperature difference model has been established,and the temperature compensation algorithm has been proposed.Thirdly,at the circuit-realization level,the specific modules have been designed.And a digital measurement and control system based on FPGA has been implemented with considering the quantization error and resource consumption in the digital signal processing.On the premise of ensuring the accuracy of the phase control and amplitude control,the performance of the digital gyroscope has been improved over the whole temperature range.Finally,according to the domestic gyroscope test standard,the digital silicon micro gyroscope experiment has been carried out.The results show that the zero bias stability of the gyroscope is 3.38°/h at room temperature.Moreover,in the temperature range from-40 ? to 60 ?,the temperature coefficients of the scale factor and zero bias with temperature compensation are 10.49ppm/? and 3.24°/h/? separately.And the zero bias stability of the gyroscope is 66.27°/h in the wide temperature range from-40 ? to 60 ?.