Research On Digital Measurement And Control Circuit Of Multiple-rings Silicon Micro-machined Gyroscope With Whole-angle Mode Operation

The measurement and control circuit with whole-angle mode operation can directly detect the rotation angle of the multiple-rings silicon micro-machined gyroscope and avoids the angle error caused by the diagonal rate integration.At the same time,the angle gain of multiple-rings silicon micro-machined gyroscope operating in whole-angle mode is stable,and it is not affected by pressure,voltage and temperature.In addition,the bandwidth of multiple-rings silicon micro-machined gyroscope with whole-mode operation is not limited,which can solve the problem of insufficient frequency response characteristics of multiple-rings silicon micro-machined gyroscope with angular rate output.It is of great significance to study the digital measurement and control circuit of multiple-rings silicon micro-machined gyroscope with whole-angle mode operation to meet the demands of tactical weapons,aerospace and consumer electronics.Based on the principle of Coriolis effect and precession effect,this paper firstly analyzes the structure of the multiple-rings silicon micro-machined gyroscope resonator,establishes the dynamic model of the multiple-rings silicon micro-machined gyroscope resonator,and then analyzes the influence of the structure parameters on the driving and detection signals.And then through the four antinodes polycyclic silicon micro-machined gyroscope modal analysis,calculates gyroscope slow variables on the basis of average method.And on the basis of slow variables,designs a whole-angle phase locked loop and closed loop driving circuit.By using the physical characteristic that the precession angle of the harmonic resonator is proportional to the rotation angle of the carrier,the precession angle is calculated in real time,which satisfies the application requirement of rotation angle readout in real time without producing cumulative error.Finally,Zedboard is used as the digital signal processing platform and FPGA+ARM is used to complete signal processing of the whole-angle measurement and control circuit.The digital measurement and control circuit designed in this paper can detect the rotation angle of gyroscope in real time,which realizes the function of the whole-angle mode of the multiple-rings silicon micro-machined gyroscope.The measured data shows that the frequency stability and the amplitude stability of the measurement and control circuit with whole-angle mode operation of multiple-rings silicon micro-machined gyroscope are 90 ppm and 113 ppm,and the precession factor of multiple-rings silicon micro-machined gyroscope is about 0.23.