Ion Irradiation Of Er Doped Si C And The Characteristics Of Sodium Doped Calcium Barium Niobate Waveguide

Ion irradiation as a surface modification method,it can change the physical,chemical,electro-optical and mechanical properties of the material surface.It can effectively optimize the properties of the material's surface.The method of ion irradiation is used in this paper,Erbium ion doping is carried out on the SiC crystal,the luminescence phenomena of Er ions at1.24?m were observed,and then the CBN optical waveguide structure was prepared by He ion implantation.The main contents of this paper include two parts:6H SiC crystals have been irradiated with 280 keV Er ions at doses from 5×10¹³ions/cm²to 5×10¹⁴ions/cm² with the aim of optically doping the material in the near surface region.Photoluminescence?PL?and Rutherford backscattering spectrometry studies were performed on these samples.Different from the normal 1.5?m photoluminescence,1.24?m Erbium emission were detected in all samples at low temperature.The emission observed at 1.24?m is due to Er³⁺:⁴S_3/2?⁴I_11/21/2 transition,which shows a relative increasing trend with the rise of implantation dose.We regard that irradiation-induced defects make energy transferring easier for ⁴S_3/2?⁴I_11/21/2 than ⁴I_13/2?⁴I_15/25/2 transition then 1.5?m photoluminescence is quenched in these samples.In our work,we research the fabrication and properties of planar Na:CBN waveguide by multiple energy He ion implantation.The sample implanted with?450+500+550?keV He ions at room temperature with fluence of?3+3+3?×10¹66 ions/cm².Prism-coupling and end-face coupling measurements were used to investigate the optical properties of our ion-implanted Na:CBN crystal.SRIM and FD-BPM simulations have been used to study the damage formation and light propagate process on the Na:CBN waveguide.Micro-Raman imaging is a powerful nondestructive approach to examine lattice modification and local micro-structural change.We performed confocal micro-Raman measurement and it is used to provide the information about the crystal structure of Na:CBN crystal after multiple energy He ion implantation.For obtain a waveguide structure in n_e polarized direction,we suggest that a“critical value”of crystal damage is exist in ion implanted Na:CBN crystal.It could carry guided mode when the implantation damage reaches a“critical value”.Finally,we obtain the waveguide structure layer with single mode transmission in n_e polarization direction.This work could provide useful information for integrated optical device based on Na:CBN crystal.