Preparation And Characterization Of Erbium-doped Optical Waveguide Film

With the development of optical communication and integrated opto-electronics, More and more attention was payed to Er3+-doped optical wave-guide amplifier (EDWA). Er-doped thin films are needed to develop Er3+-doped optical wave-guide amplifier (EDWA) This thesis detailed discusses the preparation of Er3+-SiOx wave-guide film with ion-beam-enhanced-deposition (IBED) technology and the preparation of Er3+-SiO2, Er3+-A^Os, film and glass with electron beam evaporation technology.The composition and structure of the films synthesized by IBED were examined by RBS, XRD and EDX. The Photoluminescence spectra at 1535nm of Er3+- SiOx films were measured with pumped. The relationship between optical properties of Er-doped films and technologies of IBED was summarized.