Study On Transparent Conductive Film ZnO Prepared By Radical Combustion And The Photoelectric Properties

Transparent conductive oxide films are widely used in large-area.Zinc Oxide based transparent conductive film is an excellent substitute for indium tin oxide(ITO)film.The cost of material can be reduced.Various growth techniques have been employed to produce AZO,It is divided into two categories: One is the physical preparation method,such as pulsed laser deposition(PLD),molecular beam epitaxy(MBE),atomic layer deposition(ALD),RF or DC magnetron sputtering method and so on.The equipment of the physical preparation method is expensively,besides the fabrication process is relatively complicated;The two is the preparation of wet chemical method,such as sol-gel method.It is simple that the preparation of thin film by wet chemical method,but it needs to be carried out at high temperature above 500 °C.Combustion method can prepare metal oxides at low temperature.Therefore,we have proposed the preparation of transparent conducting thin films by the chemical method of lower temperature.Further,flexible conductive thin films were prepared on flexible PET substrates.The purpose of reducing technological difficulty and manufacturing cost is achieved.This content of this research are as follows:1.We have applied a combination of the sol-gel method and combustion method together,the result shows us that the optimal zinc acetate and zinc nitrate ratio was 5:3,it were obtained that In doped Zinc Oxide(IZO)film which have good photoelectric properties.The transmittance of the visible light band of the IZO film was above 80%,and the conductivity of the film reaches 67.29 ?·cm.2.Al and F doped ZnO thin films were prepared by sol-combustion method.The F doped Zinc Oxide(FZO)has the best photoelectric performance,and the resistivity is 36.87 ?·cm.The visible light transmittance of the FZO film is more than 90%.The optimum annealing temperature of the sol-combustion method is 250 °C.The experimental mechanism of the sol-combustion method is given.3.It can be fabricated conductive film on flexible PET substrate by the sol-gel combustion method.The conductive films of IZO,Al doped ZnO(AZO)and FZO were successfully prepared on PET flexible substrates by the sol-combustion method.The photoelectric property of the film is good.A transparent conductive oxide film was prepared on a flexible substrate by a wet chemical method.