| External environmental vibration have a significant impact on the performance of the MEMS devices,and is the main factor causing output errors or even failure of the devices.In this paper,an analysis and comparison of the main vibration isolation methods of MEMS devices.A micro-structured single-layer and double-layer vibration isolation platform is proposed.The effect of platform parameters on the vibration isolation performance and the MEMS devices are analyzed,and the design criteria of the platform are determined.Based on the design criteria,the structure and preparation process of a platform are given.The main achievements of this thesis are as follows:(1)The vibration environment and the influence of vibration on the device are analyzed,and the relevant vibration isolation methods of the device are studied.(2)By studying and comparing the advantages and disadvantages of the related vibration isolation methods,the micro-structured platform is integrated with the MEMS devices for vibration isolation.Establishment the dynamic equation of single-layer and double-layer platforms.The relationship between parameters of platforms and vibration isolation performance is analyzed.Research on the influence of integrated platform on MEMS devices.Theoretical analysis shows that increasing the mass of platform can not only improve the performance of vibration isolation,but also minimize the impact of integrated platform on the performance of MEMS devices.The design criteria of vibration isolation platform are established.(3)Based on the design criteria,the design structure of platform is proposed.Reliability and rationality of vibration isolation platform design by simulation analysis.(4)The process flow of vibration isolation platform is proposed. |
