Research On Laser Micromachining Technology Of Aluminosilicate Glass

In recent years,the rapid development of ultrafast laser micromachining can be widely used in microelectronics,microsurgery and industrial processing.Ultrafast lasers can ablate and micromachine virtually any type of material,they allow cutting,milling,etching and texturing surfaces with micrometer precision control and the resulting thermal effects are negligible,provided that an optimal set of processing parameters is used.Ultrafast laser is an excellent technique for processing transparent material,benefiting from the ultrashort pulse;no wrinkles will be formed on the surface during the processing.Ultrahigh energy density transforms laser absorption of material from linear absorption into nonlinear absorption,so that it prevents thermal response zone in the machined area from forming.Similarly,ultraviolet lasers also have unique advantages in micromachining due to their short wavelength,small thermal effects around the processing area and low cost.It can effectively improve the processing precision and is widely used in the field of industrial laser micromachining.We adopted a relatively new microfabrication technique called “In volume Selective Laser Etching”(ISLE)to combine laser modified technique with chemical etching,which has gained interest in the last few years.In this paper,we study on the micromachining in Corning gorilla glass by ultrafast laser and ultraviolet laser then explore its application value in industry.The main contents are arranged as follows:1.The research status of ultrafast laser on micromachining of transparent materials.Two methods for laser micromachining in transparent materials and their corresponding etching mechanisms are introduced.2.Research on the microchannels of aluminosilicate glass fabricated by femtosecond laser selective etching.Femtosecond laser power and etch rate are important parameters for fabrication microchannels.The thermal effects can be neglected by optimal processing parameters.In the experiment,when the laser power of 5 m W,the etching velocity of0.033 mm/s,and a 100 X microscope objective are used as processing parameters,then etching with high temperature KOH solution,we fabricated a tapered aluminosilicate glass microchannels with the aspect ratio over 20.On this basis,"Z" type and "Y" type two-dimensional microchannels with the aspect ratio over 45 were fabricated.3.Research on the micromachining of aluminosilicate glass by Bessel beam.Bessel beam with long focal depth characteristics and the advantages of processing transparent materials are introduced.In the experiment,uniform microgrooves with a width of 50 ?m and a depth of at most 3 mm can be fabricated on the surface of the aluminosilicate glass by using the Bessel beam selective etching,the microgrooves have no length limitation;In laser cutting,we use chemical split instead of the previous laser split and mechanical split.It can be used for industrial high-precision removal of microscale structures of transparent materials.4.Research on the microlens array of aluminosilicate glass fabricated by Ultraviolet lasers and alkaline corrosion.We introduce the characteristics of the small heat affected zone generated by the UV laser "cold source" when processing transparent materials.Under industrial demand,the experiment finally produced concave microlens array of any fill ratio with a diameter of 20 ?m.