Investigation On The Process Of Ultrafast Laser Fabrication Of Glass Microfluidic Chips

As the basic material of micro-optical components and microfluidic chips,glass has the characteristics of high brittleness and difficult processing.When using traditional mechanical or chemical processing technology to cut,perforate or surface micro-grooves and surface welding processing,it is easy to produce cracks and breakage.It is difficult to achieve high-efficiency processing and cannot ensure the quality and yield rate to meet the demand.Can not meet the needs of production applications.Ultrafast laser processing technology utilizes the high-energy characteristics of lasers to realize material modification and removal through the interaction of photons and materials.In the processing process,the tools are free of wear and material pollution,with high efficiency,low thermal impact,and non-contaminated materials.Contact processing and other characteristics have obvious advantages in glass processing.This paper proposes the use of ultra-fast laser to process the surface micro-grooves of the glass and the welding process between the two glasses.The main research contents are as follows:Using femtosecond green light and femtosecond infrared lasers to conduct basic processing experiments on glass,research and analysis of the influence of various process parameters on the size and quality of micro-groove wire grooves during laser processing of glass.It is found that the cumulative energy has an important effect on the surface quality of the glass micro-groove wire groove.When the femtosecond green light is used for processing,when the cumulative energy per unit area is in the range of 130?J-140?J,the quality of the micro groove wire groove is better;when the femtosecond infrared is used for processing,When the accumulated energy per unit area is about 80?J,it can meet the requirements.And it is found that high-frequency and high-speed processing is better than low-frequency and low-speed processing under the same accumulated energy,the straightness and consistency of the micro-groove groove are better,and the sidewalls are smooth and tidy,and the quality is higher.On the basis of the process research of using femtosecond laser to process glass micro-groove,continue to study the process experiment of processing micro-grooves with different aspect ratios,research and analyze the line spacing and path selection during horizontal processing and the feed during vertical processing.Through comparison,it is found that the optimal line spacing for horizontal processing should be 5?m,and the optimal processing sequence should be to process both sides of the micro groove first,and then process the middle part from left to right in turn;each feed should be set for longitudinal processing the amount is 12 ?m,and a micro groove with a maximum aspect ratio of about1.5-1.6 can be obtained.And the recast layer can be effectively removed by the upward defocusing method to obtain micro grooves of different depths and sizes.Infrared picosecond pulsed laser was used to conduct micro-welding processing experiments between two pieces of glass.The influences of variety scanning speed,pulse power and frequency on the quality of glass welding were analyzed.Through the analysis of weld strength and cross section,it was found that only the energy was moderate.In order to form a weld with good quality and high strength,it is found that the focus position of the laser also has an important influence on the welding of the glass.A proper focus position of the laser can achieve effective welding of two glasses without optical contact.