Compensation Device For Excimer Laser Surface Micro Machining Process Based On MPC08 Control Card

With the development of micro manufacturing technology,MEMS system has gradually entered people's life and is widely used in military,aerospace,national defense,industry,medical,agriculture and other fields.Especially in the field of biomedicine,microfabrication technology is used to manufacture various devices suitable for biological cells and biological macromolecules.For example: micro pumps,micro valves,microphones,micro grooves,micro utensils and micro flowmeters.Because of the large volume of machine tools and heavy fixture,it is difficult to obtain smaller machining accuracy for CNC machine tools.In contrast,laser processing is especially suitable for micro machining because the optical properties of fine spot are obtained by beam focusing.Laser micromachining is divided into two forms: laser mask projection and laser direct writing etching.Direct etching has attracted much attention due to its stable performance and low cost.The positioning accuracy of the macro processing is mostly in the millimeter range,and the micro machining size is concentrated in the range of tens of nanometers to several hundred microns.The high resolution of excimer laser makes its machining accuracy usually tens of microns,and has the characteristics of high power,low absorption and low heat.The existing machining platform is mostly applied to planar workpiece,and the surface workpiece is relatively lacking.In the process of surface workpiece machining,the workpiece surface is uneven and inconsistent.Therefore,tracking and compensation of machining position is particularly important in the process of surface workpiece micro machining.The main work of this paper is to realize the real-time monitoring and compensation of the machining position during the excimer laser surface micromachining,so that the machining platform has the same fluctuation with the workpiece surface.At the same time,the device will be designed to be suitable for machining metal and non-metallic materials.The device is composed of six axis electric translation platform,MPC08 control card,laser sensing head,laser sensing controller and PC control terminal.The experimental results show that the compensation error of the device is within 20 ?m,and the performance of the device is in line with the design expectation.The main contents include:First,the hardware platform planning and software design framework of the device are described,and the data transmission mode between components of the device is introduced.Secondly,the internal structure and working principle of the laser displacement sensor are studied,and the difference between the laser displacement sensor and other sensors is discussed.The laser displacement sensor is combined with the six dimensional electric translation to form a processing platform.Then,the Win32 control program of excimer surface machining based on MPC08 control card is developed by using MFC framework.Finally,the optimization measures are put forward by analyzing the performance and error factors of the system.