Numerical Simulation On Effect Of Self-bias On Low Pressure Radio Frequency Argon Glow Discharge

The cost of glow discharge plasma technology is not high,and it coincides with the concept of environmental protection advocated at this stage.With the advantages of this technology,it has been widely used in many industrial fields.For example,semiconductor fabrication and fabrication,plasma etching,plasma film deposition in the field of microelectronics have been applied in material surface modification,medical,chemical,environmental protection and other fields.Compared with atmospheric pressure and high pressure,glow discharge plasma is easier to produce at low pressure.However,the plasma generated by glow discharge at low pressure is a very complex non-linear physical process,and its physical mechanism is still unclear.Among them,there are few in-depth studies on the effects of self-bias caused by charged particles deposited on the electrodes,including the mechanism of the influence on the discharge structure,the mechanism of energy conversion in the discharge process,and the mechanism of the influence of discharge conditions on the discharge mode.In order to improve the application efficiency in the field of low temperature plasma,we must make a thorough and meticulous study on the influence of self-bias on plasma discharge.With the continuous development of computer technology in recent years,the computing speed and storage space of computer have been continuously improved,which provides favorable conditions for numerical simulation.The numerical simulation is a common method to study plasma.It has the characteristics of high precision,low cost and small error.Therefore,this paper systematically studies the influence of different self-bias on low-pressure argon RF capacitive glow discharge at parallel plate electrodes by constructing a fluid model for numerical analysis.In this paper,a fluid model is constructed,and the discrete equations of its physical quantities are obtained by dimensionless and differential transformation under specified conditions.The generation of self-bias is a complex physical process,which is affected by a series of factors such as electrode materials.In this work,we mainly focus on two parameters: peak value of self-bias and saturation time of self-bias.Therefore,a simple self-bias model including peak value of self-bias and saturation time of self-bias is established.In this paper,the effects of different self-bias on low pressure argon RF capacitive glow discharge at parallel plate electrodes are discussed by using this model.After two thousand RF cycles,the spatial distribution of some macrophysical quantities of plasma under different self-bias is obtained.Finally,the results are analyzed and explained to draw a conclusion.This study provides further theoretical support for glow discharge and its application.This paper is divided into two parts to study the effect of self-bias on low-pressure argon glow discharge.The first part studies the influence of peak value of self-bias and saturation time of self-bias on the ionization of low-pressure argon glow discharge respectively.The second part mainly discusses the influence of different self-bias conditions on the energy transfer of low-pressure argon glow discharge.The results show that with the increase of the peak value of self-bias,the sheath of driving electrode becomes wider and the sheath of grounding electrode becomes narrower,and the peak value of each physical quantity changes accordingly,which destroys the symmetrical discharge structure,while the different saturation time of self-bias has little effect on the spatial distribution of each physical quantity.