Research On Laser Tracing Interferometric Signal Processing Method

With the development of high-end precision equipment manufacturing industry,the precision level of high-end precision equipment is getting higher and higher,and higher requirements are placed on the accuracy of measuring instruments for calibrating high-end precision equipment.The coordinate measuring machine is the main measuring equipment for modern automatic measurement of complex shape parts.Its high-precision calibration has become a key technical problem,which puts higher requirements on the measurement accuracy of the laser tracking measurement system as a calibration instrument.The purpose of this topic "Research on laser tracking interferometry signal processing method" is to design a laser tracking interferometry signal processing system based on the existing laser tracking interferometry mechanical structure,so as to realize the acquisition and processing of interference signals generated in the tracking process of the laser tracking interferometry system.This topic mainly focuses on the interferometric signal processing of a laser tracking measurement system.The specific contents are as follows:(1)The principle of laser interference ranging and the principle of tracking control are analyzed.A laser tracking interferometry signal processing method based on ARM and FPGA is proposed.(2)The hardware circuit of laser tracking interferometric signal processing system is designed,including FPGA signal receiving and the processing module,ARM receiving module and network port communication module,which completes the functions of interference signal receiving,discerning direction and 4-subdivisions,count,storage and so on.(3)The PC software of the laser tracking interferometry signal processing system is designed to realize the measurement of the moving displacement of the target mirror.In this paper,some key technologies of the subject research have been verified by experiments,including:(1)stability testing of laser tracking measurement system servo motor;(2)experimental testing of the correctness and feasibility of the network communication function of the laser tracking interferometric signal processing system.(3)experimentally tested the stability of the laser tracking interferometric signal processing system;(4)experimentally tested the feasibility of the laser tracking interferometric signal processing circuit.