Effect Of Graphene Functionally Graded Materials On Micro-electro-mechanical Dynamics

The preparation materials of the existing micro-electromechanical system(MEMS)core components are single homogenous materials such as monocrystalline silicon,polysilicon,silicon oxide,shape memory alloy,etc.,and their respective electrical,thermal,mechanical,and optical properties have been compared.The big limitations,which led to a greater impact on the overall performance of its MEMS.If the graphene can be doped into the core member and dope the graphene material in different positions in different proportions,so as to construct the so-called graphene functional gradient material,which is used for the core component of the MEMS,it will greatly Improve micro-electromechanical performance.The study in this paper captures this starting point and theoretically studies in advance what changes will occur in the dynamic characteristics of the MEMS after applying the graphene functional gradient material to the MEMS core components.The ratio of olefin doping,and the doping concentration at different locations have an influence on the dynamics of the MEMS,eventually yielding quantitative data.To meet different performance requirements in the future,a quantitative reference is provided for the design and manufacture of MEMS based on graphene-enhanced functional gradient materials.In this paper,the micro-actuators with graphene-enhanced functionally graded materials as the matrix are studied.The main research contents are as follows:(1)Based on the Halpin-Tsai model,the effect of the ratio of graphene doping on the dynamic characteristics of graphene-enhanced functionally graded material microactuators was discussed,and the design of microelectromechanical systems requiring different dynamic characteristics was investigated.Manufacturing provides the most reasonable doping preparation solution.According to the requirement of performance,graphene is doped into different positions in metal-based or polymer-based materials in different proportions to form a graphene-enhanced functionally graded material.The graphene doping ratio is used to quantify the graphene enhancement function by using this model.The effect of the elastic modulus of the gradient material.Then,the dynamic response of the actuator is analyzed by the dynamic model of the microbeam,and the dynamic characteristics of the MEMS are analyzed.In order to quantify the influence of graphene doping ratio on the dynamic characteristics of MEMS,the most reasonable graphene doping ratio scheme is provided for MEMS which require different dynamic characteristics,so that graphene enhances the functional gradient material of MEMS.Excellent performance is better explored.(2)Kinetics of multi-linear coupling(non-linear electrostatic and geometric non-linear)of microactuators based on graphene enhanced functionally graded materials was constructed using the model of iron-molding-Ke-beam(with W,U,and ? as displacement functions).The model studies the effect of hybrid nonlinearity on the dynamic characteristics of micro/nano actuators.In-depth analysis of the impact of various nonlinear factors on the dynamic characteristics of the micro-actuator,thus providing a more rational theoretical support for the design of micro-actuators,making the design of various micro-actuators more reliable and more secure applications.(3)The micro-electro-mechanical system has micro-scale dimensions,and many of the properties that are often overlooked under macroscopic conditions have obvious manifestations at the microscale.The mechanical properties of systems and structures exhibit a strong scale effect.In this paper,the effect of feature size on the dynamic characteristics of microbeams is discussed in detail in terms of scale effects.This gives a more complete understanding of the dynamic characteristics of the MEMS of graphene-enhanced functionally graded materials.