Study On The Micro-/array-structure Of PVDF With Spatially Modulated Electric Field

To make a better online inspection on the leakproofness of packages,this paper did research on PVDF piezoelectric film which is the core component of PVDF piezoelectric sensor in order to preparate the high sensitivity micro structure gas sensor for monitoring the change in air pressure in sealed package.The main works of this paper are as follows:Firstly,the fabrication of PVDF large depth width ratio micro array structure was realized by using the pre fabricated structure of polymer space modulated electric field force drive forming technology.Secondly,upon to the piezoelectric theory,a tapered micro array structure for gas pressure sensor was proposed through simulation analysis of piezoelectric properties of thin films of different micro arrays.The PVDF tapered micro array structure was preparated.Thirdly,the morphology and crystal phase characteristics of PVDF micro array were analyzed,and the influence of process parameters such as voltage,air gap,temperature and other parameters on the electric field driving process was discussed.Finally,the problem of polarization and breakdown in the driving process of electric field force was discussed.