| Nb2O5 thin film has excellent optical properties of strong ultraviolet absorption and good antighost effect in the monitor.The advantage of niobium oxide thin film attracts more and more attention in development and application.Nb2O5 target is the source material for making niobium oxide thin films by magnetron sputtering,Nb2O5 coating target,in this paper,is prepared by plasma spraying technique.The preparation of Nb2O5feedstock suitable for plasma spraying was studies and the structure of Nb2O5 coating was investigated.The optimal process of Nb2O5 coating by plasma spraying was obtained.Based on the laboratory research results Nb2O5 magnetron sputtering target in large size was exploited.?1?The agglomerated powders were prepared by spray-drying with Nb2O5 raw powders at the condition of solids content 30wt%,binder content 1.0wt%,dispersant content 0.5-1.0g,inlet air temperature 270?,outlet air temperature 100?,peristaltic pump speed 35-40r/min.The Nb2O5 agglomerated powders were then sintered at 1100?and1250?for 2h and 3h respectively.The sintered powders have right size and good flowability for used as feedstock of plasma spraying.?2?Process optimization of Nb2O5 coating plasma spraying was carried out in the laboratory and the optimized parameters obtained were:feedstock sintered at 1250?and3h,spray power 28kw,spray distance 100mm.The structure of plasma sprayed Nb2O5coating is uniform and very dense?compact of>95%?.There were few microscopic defects in the coating.?3?The optimized spray parameters achieved in the laboratory were applied to produce Nb2O5 rotatable target in large size of?229×1773×12mm,using low pressure plasma spraying technology.The rotatable target produced is Nb2O5 in high purity and the density of the target coating reaches more than 95%.The both end sides of the target have no chipping and the surface of target is no pits,cracks and other macroscopic defects.The Nb2O5rotatable target exploited can meet the technical requirements of industrial applications. |
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