Fabrication Of PZT Piezoelectric Film By E-jet And P(VDF-TrFe) Fiber By Near-field Electrostatic Spinning

PZT film are widely used in microelectronics,optoelectronics,integrated optics and microelectromechanical systems because of excellent dielectric,ferroelectric and pyroelectric properties.However,many fabrication of PZT film are not fully compatible with MEMS device manufacturing processes,there is a great constraint on the design of integrated PZT film.Compared with other material deposition method,high resolution PZT film can be prepared by electrohynamic jet printing because of the advantage of environmental,inexpensive,and controllable.Near-field electrospinning can accurately control the position of the fiber deposition in the manufacturing technology of the micro-nano fiber structure and realize the large area"direct-writing"P?VDF-TrFE?fiber,and more conducive to the orderly arrangement of P?VDF-TrFE?fiber spinning fiber diameter can be controlled from tens of nanometers to tens of microns,with a large specific surface area and special mechanical and electrical properties,micro nanotechnology and biomedicine and other fields have a wide range of applications.In this thesis,PZT52/48 and P?VDF-TrFE?precursor sol were successfully prepared at room temperature.The E-jet experimental platform were set up,and the PZT film was printed on the Pt/Ti/SiO₂/Si substrate,and the thickness of the film was controlled by multilayer printing,and each layer can be controlled below 10nm Finally,the PZT film samples of three thicknesses?220nm,340nm,420nm?were obtained by high-temperature annealing at 650°C.The surface of PZT filmwas observed by optical microscope and scanning electron microscope.The surface of PZT filmwas uniform,dense and free of cracks and bubbles,and it was well bonded with Pt/Ti/SiO₂/Si substrate.At the same time,the crystal structure of PZT film was analyzed by XRD.The PZT film completely transformed into perovskite phase at 650?and grown preferentially along the?111?direction.P?VDF-TrFE?piezoelectric fibers were prepared by near-field electrospinning using e-jet experimental platform.Effect of different electrospinning parameters on fiber diameter and morphology were studied.Results show that the concentration of P?VDF-TrFE?electrospinning solution plays a decisive role in fiber formation.When the concentration of P?VDF-TrFE?electrospinning solution is less than 12wt%,fiber structure cannot be formed in substrate,because the P?VDF-TrFE?solution were not fully volatilization;under the same conditions,as the voltage and the speed of collector increases,the fiber of diameter becames smaller.Finally,the P?VDF-TrFE?fiber diameter is in the range of 0.5?m-12?m by controlling the electrospinning parameters.In addition,the P?VDF-TrFE?fiber array has been fabricated on a flexible printed circuit board?FPC?with a width of 8 mm and a pitch of 10?m in-line polarization of the P?VDF-TrFE?fiber.Two schemes of cantilever vibration and reciprocating tensile were put forward respectively to test the piezoelectricity of P?VDF-TrFE?green fiber.