Fabrication Of MoRe Superconducting Planar Cavity And Exploration Of Graphene Superconducting Josephson Junction

Since scientists exfoliated graphene with tape in 2004,graphene has become a research hotspot because of its ultra-high electron mobility,special zero-band-gap band structure,and the existence of electrons similar to Dirac electrons near its Fermi surface.Many works,such as anomalous quantum Hall effect,mesoscopic transport phenomena and superconducting bits in quantum information,focus on graphene.Processing details and special phenomena of MoRe alloy superconducting microwave planar cavity and graphene superconducting junction are studied in this paper for the purpose of designing and manufacturing bit-related cavities and junctions.1.Basic theoretical knowledge of research.The origin of graphene bipolarity,the special properties of graphene superconducting junction and related transport phenomena,as well as the extraction of important parameters of superconducting metals are introduced.2.Chip processing technology and low temperature measurement platform.The acquisition and transfer processes of two-dimensional materials are described.The micro-and nano-fabrication processes related to cavity and superconducting junction are introduced.The working principle of ultra-low temperature equipment is also discussed.3.Design and fabrication of MoRe alloy superconducting microwave planar cavities.This paper discusses how to design and simulate the structure of a superconducting microwave planar cavity.The properties of MoRe alloy and its micro nano processing technology were explored.4.Fabrication and related phenomena of graphene superconducting junctions.The internal mechanism of the grapheme superconducting junction is studied.The main innovations of this paper are as follows:1,A superconducting microwave planar cavity for MoRe alloy has been designed and fabricated.Although the metal was commercialized earlier,few people used it to fabricate micro nano structures.In the process of contacting with this kind of metal,I found many peculiar properties,and improved the micro-nano processing technology accordingly according to its particularity.2.We explored the manufacturing process of graphene superconducting junction.The etching process for one dimension contact is mainly studied.Special phenomena related to graphene superconducting junctions were also investigated.The mechanism of the special phenomenon of graphene superconductor junction is discussed.