Preparation Of VO₂ Thin Films By Magnetron Sputtering And Study On Their Structure And Properties

As one of the smart energy-saving materials,VO₂ has excellent dimming performance and can intelligently control the indoor temperature according to the changes in the environment.However,in order to apply VO₂ in real life,it is necessary to decrease the phase transition temperature to near room temperature and to increase the average visible light transmittance of the film.In this background,when ceramic V₂O₅ was used as the target,the effects of deposition temperature,film thickness,deposition atmosphere and annealing on film structure,phase transition temperature and average visible light transmittance were studied.When metal V was used as the target,the effect of sputtering power,atmospheric flow and annealing on film structure,phase transition temperature and average visible light transmission were studied.The results obtained are showed below:?1?When a V₂O₅ target is used,400? is the best deposition temperature for obtaining VO₂?M?film.Films prepared at different deposition temperatures and H/O-doped films are annealed at 500? to obtain?100?oriented VO₂?M?with good crystallinity;when using a V target,a single-phase VO₂?M?film at a sputtering power of300 Wwith O₂ flow around 3 sccm can be obtained after annealing at 500?.?2?The phase transition temperature of 60 nm VO₂?M?film deposited at 400? decreased first and then increased with the increase of annealing temperature.For films prepared from different deposition temperatures and annealed at 500?,the phase transition temperature of the film with the same film thickness tends to gradually decrease with increasing deposition temperature;H doping can reduce the phase transition temperature of the film.The phase transition temperature of the film can be controlled according to the H₂ flow rate introduced during the preparation,the annealing temperature and the annealing time;the presence of the low-valence vanadium oxide decrease the phase transition temperature of the VO₂?M?film.?3?The average visible light transmittance of 60 nm VO₂?M?film is the highest,about 50%;The presence of high-and low-valence vanadium oxide can increase the average visible light transmittance of the VO₂?M?film;Heat treatment is beneficial to improve the average visible light transmittance of the film.