Influence Of The Key Components On Precision Of The DZ507 Grinding Wheel Dicing Saw Machine

The grinding wheel dicing saw machine is a kind of high-precision equipment spread used to cut semiconductor wafers.Semiconductor is widely employed in the field of computer,communication,aeronautics and astronautics,biotechnology,electronics,even household appliances and other aspects in today's society.So the accuracy,performance and stability of the wheel dicing machine is also put forward higher requirements.The project originates from a research Institute.The purpose of this project is to improve the reliability of the dicing machine and to analyze and optimize the dynamic performance of the equipment.Therefore,this paper takes a DZ507 high-precision grinding wheel dicing machine as the research object,from the following two aspects:on the one hand,the model of the influence on machine precision is established due to wear of lead screw and guide rail;on the other hand is through dynamics analysis of the whole machine,obtains the dynamic error of the processing.The main contents of the paper are as follows:(1)By literature and the history of failure of the machine,analyze the main factors affecting the precision of grinding wheel scribing machine,and build the 3-D model of DZ507 grinding wheel dicing machine according to data of dicing machine in service.(2)According to the Hertz contact theory and Archard wear theory,the accuracy loss model of ball screw and linear ball rolling guideway used by wheel scribing machine is established under the condition of considering preload force and the motion errors of each motion system are calculated.(3)The error model of grinding wheel dicing machine is established to obtain the motion precision of the grinding wheel dicing machine by using the theory of multi-body system.(4)Based on the accuracy loss model and the literature,the stiffness of the joint surface of the nut screw and the guide slide was calculated and coefficient of the contact surface was obtained.The finite element dynamic model of the whole machine is established to obtaine the dynamic precision of the grinding wheel.(5)According to the analysis conclusion,put forward the reasonable suggestions to improve the precision of dicing machine.Through the above two directions research of wear and kinetics,model and analyze precision of DZ507 grinding wheel dicing saw machine,puts forward some suggestions.It's of great significance to improve the reliability of scribing machine.