Research On Rotating Compensator Spectral Magneto-optical Ellipsometry System

With the development of science and technology and the advancement of industrial manufacturing capabilities,new film materials are emerging,and film materials are playing an increasingly important role in communications,biology,and military industries.Magnetic film materials have attracted more and more attention as a special film material because of its excellent performance in magnetic storage.magneto-optical sensor devices,magneto-optical switches and other fields.The preparation and optimization of magnetic film materials require more advanced magnetic film material characterization techniques.Magneto-optical ellipsometry has the advantages of high sensitivity,high precision,fast measurement speed,no damage to samples,real-time monitoring of sample growth process,etc.It is an ideal research method for magnetic film materials.In view of the problems existing in the current magneto-optical ellipsometry technology,this paper innovatively proposes a rotating compensator spectral magneto-optical ellipsometry system,which can reduce the influence of DC signal,high-frequency signal and ambient light during the test.greatly improve the signal-to-noise ratio;obtain the sine and cosine values of the ellipsometric parameters,solve the problem of uncertainty of the ellipsometric parameter,measure multiple optical and magnetic parameters of the material at one time,effectively improve the measurement speed and reduce the error.The system has strong industrial applicability.In this paper,based on the Muller matrix of polarization theory,the principle of rotating compensator spectral magneto-optical ellipsometry system is deduced,and the expression of the system's outgoing light intensity is obtained.The method of solving the material Mueller matrix element is obtained by using this expression.Based on the theory of magneto-optical Kerr effect,the magnetic material.single-layer magnetic film material and multilayer thin-film magnetic material were modeled.The method of analyzing the thickness,optical parameters and magnetic parameters of isotropic nano magnetic film materials using this system is presented.A rotating compensator spectral magneto-optical ellipsometry system is constructed.The influence of the incident angle error,the polarizer angle error,the compensator angle error and the analyzer angle error on the magneto-optical coupling coefficient test results is simulated and analyzed.A calibration method for the exact angle of the above device is proposed.