Preparation,Optimization And System Testing Of Thermal Driving Thin Film

The thermo-pneumatic electrothermal driven device is used in office printing and material research,its high-reliability micro-driving is based on liquid jetting mechanism.Therefore,the corresponding structural design and material requirements are needed hotly.The core principle of a thermopneumatic electrothermal driver starts from the heat conduction of the electrothermally driven film itself,igniting liquid bubble nucleation,then goes into the nucleation bubble growth,fusion,and ends in ultimately driving the emission behavior of the droplet.To evaluate the droplet jetting performance of pneumatic electrothermal driving,we need not only to focus on the film itself,but also to observe the bubble nucleation effect,and it is more necessary to detect the droplet jetting state.Although HP and Canon have relatively good film design and manufacturing methods and test systems,there are still fewer systematic and in-depth engineering researches and explorations in Chinese market.Under firstly referring to the principle of electrothermal driving film preparation,an electrothermal driving TaN film was prepared by using a reactive magnetron sputtering furnace,especially by optimizing the film quality via the N2 flow control.Thus an electrothermal driven film with square resistance of about 85 ?/? and thickness of about 1500 A was successfully prepared.Another emphasis built bubble nucleation observation system for nucleation state study.By using the droplet jetting measurement system,I comprehensively judge the optimization degrees of the film performance from the parameter dimensions such as threshold voltage,driving voltage and life time.Finally,the optimization effect can be judged by combining the above test results.The research results show that:(1)changing film properties in reasonable direction by N2 flow control;(2)the bubble nucleation status be close to the standard type after film optimization;(3)the threshold voltage and operating voltage are stability,the maximum lifetime is about firing 600 million times.Thus,for the thermo-pneumatic electrothermal driven TaN film,N2 flow control is a primary factor to optimize the film performance;further,it is necessary to use a system-level test method to evaluate the film driving performance.My works cover certain reference values for correlated engineering researches,the film optimization direction and the test method show good supplemental information to industry peers in China.