Design Of Graphene Terahertz MEMS Metamaterial Spectrum Modulator

Terahertz metamaterial devices have important application prospects in communication systems,radar shielding,space exploration and other fields,and have attracted extensive attention in recent years.Periodic micro-nano metamaterials based on nanotechnology can exhibit excellent sensitivity in terahertz band,especially in the integrated design with graphene two-dimensional materials to obtain better spectral modulation characteristics.This paper proposes a terahertz modulator that integrates terahertz metamaterial and graphene two-dimensional material,along with theoretical research,software simulation and flow sheet test.The main work of this paper is as follows:Firstly,the device characteristics of terahertz metamaterials are modeled and analyzed on the CST Microwave Studio simulation platform,and the structure and geometric parameters of single-layer and multi-layer metamaterials are simulated and optimized to obtain the optimal parameters of the terahertz filter.Single layer terahertz metamaterials can produce good filtering effect in low terahertz frequency band.Multilayer terahertz metamaterials can realize ultra-wide band filtering of terahertz wave,which has a bandwidth of about 2.5 THz.Secondly,based on the micro-nano integrated fabrication process,a single layer terahertz metamaterials is designed,the chip structure is tested by terahertz time domain system.The test data and simulation data are compared to verify the correctness and feasibility of the simulation and theoretical basis.Thirdly,the graphene film was transferred onto the terahertz metamaterials with the Fractured Tian glyph structure,and the bias voltage was added to the graphene film.Testing and analysis in terahertz time domain analysis system show that at 0.56THz,the prepared graphene terahertz modulator has the strongest modulation on terahertz wave,which reaches 48.3%.In this paper,terahertz filters capable of filtering in low frequency band and ultra-wide band filtering in high frequency band are obtained by simulation,and the consistency of the theory and simulation is verified by test.The terahertz wave can be modulated by a terahertz modulator integrated with graphene.The modulation depth can reach 48.3%.The terahertz filter and the terahertz modulator proposed in this paper are of great significance to the research and development of terahertz wave.