Study Of Micro-shaping Of Zr-Based Bulk Metallic Glass By Wire Electrochemical Micro Machining With Workpiece Reciprocating Traveling

Metallic glass has broad prospects in the field of microfabrication and precision machining due to its unique atomic,electronic structure and excellent material properties.and can be used in the manufacture of high-performance microstructures and components in microelectromechanical systems?MEMS?.However,temperature and pressure will affect the properties of metallic glass during micromachining.At present,the micromachining technology of metallic glass is still immature.Micro-electrochemical machining has the advantages of no heat-affected zone,no stress,no loss of electrode,easy to realize micro-machining,etc.On this basis,micro-scale wire is used as the tool cathode for the wire electrochemical micro machining?WECMM?technology.Except for advantages of Micro-electrochemical machining technology,it is also a promising micro-fabrication technology by processing complex three-dimensional microstructures through the relatively simple relative motion of the cathode and the anode.Combining the WECMM technology with the microfabrication of Zr-based metallic glass may result in excellent process results.The main research content includes the following parts:?1?Aiming at the problem of low mass transfer efficiency in traditional silk motion mode,this paper adopts the method of vibration mass transfer of workpieces for wire electrochemical micro machining and introduces its principle and characteristics,establishes the flow field model in the machining gap,and analyzes the machining gap.The flow field distribution and mass transfer characteristics during processing.?2?The polarization characteristics of Zr-based metallic glass in different solutions were measured.On the basis of this,the electrochemical dissolution characteristics of Zr-based metallic glass were analyzed.The results show that the Zr-based metallic glass is easily hindered by passivation film in aqueous solution.The dissolution proceeds;the pH of the electrolyte has a greater influence on its dissolution process;Cl^-increases the rate of cracking and material removal of the passivation film during anodic polarization.?3?Introduced the test platform for the research of wire electrochemical micro machining.A special fixture for anode vibration is designed.A preliminary study on the moving electrolysis wire-cutting test of zirconium-based metallic glass workpieces was carried out.The results show that the dilute hydrochloric acid solution is more suitable for the processing of Zr-based metallic glass;the high-precision micro-seam can be processed by using reasonable parameters.?4?For processing high-thickness workpieces,transformation of the test platform was done,and the processing test of high-thickness Zr-based metallic glass was carried out.The results show that the vibration mass transfer method of the workpiece can effectively improve the mass transfer efficiency during processing.The electrolyte in the machining gap is more evenly distributed in the electric field,thus improving the processing efficiency and processing accuracy.The reasonable parameter processing speed can be increased to 0.2.?m×s^-1,and micro-slits with an aspect ratio of 13 and a standard deviation of less than 2.5 are processed on a zirconium-based metallic glass having a thickness of 500?m to further process a complex microstructure with high precision and high surface quality.