Research On High Voltage Power Supply Assisted Electrostatic Actuation Micro Electrochemical Machining Method

In the micro-electrochemical machining(?ECM)process,the workpiece and the electrode are not in contact with each other and the material is removed in the form of ions.The processing has high accuracy and the electrode has no wear.So ?ECM has a broad development prospect in the field of micro-component processing.However,the processing environment for micro electrochemical machining is strict,and the inter-electrode gap needs to reach the micron level.High-precision machine tools and complicated control systems are required.As a result,high cost is extremely needed.In addition,the processing impurities are not easily discharged,resulting in scattered corrosion in the non-processed area and affecting the processing accuracy.In order to solve the above problems,the electrostatic actuation method is applied to micro electrochemical machining.An electrostatic force is generated by an independent pulse power to drive the flat electrode to bend,achieving high precision micro feed.Electrostatic actuation technology is the key to control the inter-electrode gap.The electrostatic actuation of the auxiliary power supply is analyzed.The electrostatic force,deflection and threshold voltage of the flat electrode are calculated.And the relationship between the electrode amplitude and the power supply voltage,the electrode vibration frequency and the power frequency are analyzed.The relationship confirms the feasibility of the electrostatic actuation method.The processing system is built by analyzing the experimental requirements of micro electrochemical machining based on electrostatic actuation,which includes processing platform,flat electrodes,clamping devices,power supplies,electrostatic brake assist system and motion control system.In order to explore the effect of electrostatic actuation micro-feeding,several sets of comparative experiments are completed to observe the machining accuracy and processing efficiency.These experiments include the comparison of the machining effect with or without electrostatic actuation,the influence of the auxiliary power,the preferred experiment of the feed rate,and the processing of various microstructures.Through observation and measurement analysis,the micro electrochemical machining method based on electrostatic actuation used in this paper has higher processing accuracy.Processing efficiency is improved by this method.The reliance on high-precision machine tools is successfully reduced.The complex servo control requires are also avoided.And finally the cost of micro electrochemical machining is reduced.