Study Of Novel Nano-channel Fabrication Methods

Nanotechnology is the current trend of technological development in the world,and its progress has brought new ones to us.Due to the potential applications of nanochannel,such as DNA sequencing,biological macromolecule detection,nano template,particle screening,drug delivery and multi-layer interconnect,nanochannel has important value and becomes a hot spot in academic research.The nanochannel structure is divided into nanopores and nanochannels.The two structures are similar with different positioning.The former pays more attention to the diameter of the aperture and pursues a shorter length of aperture,while the latter has a larger diameter but requires a longer aperture and a variety of runner shapes.As for DNA sequencing technology,scientists have developed nanopores which is a high-throughput,fast,simple,cost-effective,DNA sequencing method.Because of its closeness to biological macromolecules,nanopore can be used for single molecule monitoring of various biomolecules,including DNA,RNA,peptides,polysaccharides,etc.and some commercial products have already been produced.There are so many achievements of nanochannels in the areas of drug delivery,biochips,chemical synthesis,and multilayer interconnects.Therefore,they need to be fabricated in a simpler,more controllable,faster,and more cost-effective way to be widely used in the future.In this paper,combined with the mature processes,such as PECVD deposition,the pore size of the nanopore array on the porous AAO is controlled with the change of the pore cross-sectional morphology during the deposition process.Combined with simulation,we studied the principle of the sedimentation shrinkage method,and compared with the experimental results to verify the simulation results.In addition,more novel technologies such as laser direct writing technology have been explored to realize the preparation of nanochannels in SiO₂-Sn-SiO₂ sandwich structures.The first is porous AAO film pore size control experiments based on PECVD.It mainly studied the control of the pole size during the PECVD deposition of SiO₂,and the effect on the cross-sectional morphology of pores.During deposition experiments,the effects of PECVD deposition process parameters were investigated,including deposition time,RF power,gas flow,substrate temperature,and pressure.During the deposition of SiO₂,all the parameters are fixed except deposition time,and the pore size of the AAO hole array is controlled only by the deposition time.After the samples were characterized,the control curve was obtained through statistical fitting.Through the theoretical analysis and simulation,the cross-section morphology of the hole was simulated and compared with the experimental results,which verified the theoretical analysis.Then,based on the laser direct write technology,the nanochannels fabrication with laser direct writing technology was mainly studied.Through understanding of the principle of laser direct writing technology,a nanometer flow channel preparation scheme was developed.Samples with reservoirs were prepared after sputtering,photolithography,etching,etc.,followed by laser direct writing experiments to fabricate nanochannels between reservoirs.The PDMS microfluidic channel fabricated with the inverted mold is combined with a bonding process to form a micro-nano channel device for testing.Compared with other methods which can only fabricate a small number of nanopores,these two methods can quickly fabricate multiple nanopores or nanochannels.This is a major feature of these two methods.