Design Of Composite Quartz Cycloidal Micro-Strain Actuator

Under the background of "Made in China 2025",vigorously improving the accuracy of scientific instruments is an inevitable trend that China's traditional manufacturing industry can transform and upgrade,and intelligent manufacturing technology and equipment can be innovatively developed.Vibration is an important factor affecting the accuracy of scientific instruments.Especially optical equipment and optical components are highly susceptible to vibration.Very small vibrations can cause unclear focus.Larger vibrations can cause unclear changes over time.Very large vibrations can even cause damage to the system structure.As one of the core technologies of ultra-precision measuring/testing instruments and ultra-precision processing equipment,the isolation/damping technology is a bottleneck that limits the further improvement of instrument accuracy.The single pendulum/damping system is an important part of the seismic isolation device of the gravitational wave detection system.It is a research hotspot that can further improve the accuracy of the instrument.The development of high-performance actuators is the key to research on micro-vibration technology.This topic is aimed at the development requirements of scientific instrument accuracy improvement.Based on the isolation/damping technology,the design of composite quartz cycloid micro-strain actuators is carried out based on the single pendulum vibration isolation system.The main research work of this paper are as follows:Firstly,the magnetic coupling characteristics of the composite quartz cycloid microactuator are established by analyzing the magnetic coupling characteristics of the giant magnetostrictive material(GMM)and the strain characteristics of the fiber grating(FBG).On this basis,the single pendulum is analyzed.Based on the basic principle of the damping system,the micro-vibration principle of the composite quartz cycloid is obtained,which provides a theoretical basis for the design of the composite quartz cycloid micro-strain actuator.Then,the coupling method between the giant magnetostrictive material and the fiber grating quartz cycloid is studied.The method of preparing the composite quartz cycloid by composite bonding and magnetron sputtering coating is proposed,and the two methods are observed by metallographic microscope.The film thickness and uniformity of the prepared composite quartz cycloid are summarized,and the advantages and disadvantages of the two preparation methods are summarized.Next,the structure of the composite quartz cycloid micro-strain actuator is designed and optimized.Based on the existing UOI-CtlG v4.2 GMA drive part of the laboratory,the structure is designed and optimized.And the whole magnetic field of the composite quartz cycloid micro-strain actuator was simulated by software such as COMSOL,and the relationship between the magnetic field and the coating thickness and the linear quartz cycloidal variable was simulated.Finally,the experimental system of composite quartz cycloid micro-strain actuator is built.The relevant index and damping effect of micro-strain actuator are measured.The resolution is 0.1?m and the corresponding excitation current resolution is 0.25 A.The implementation range is-0.92?m~5.96?m,and the corresponding excitation current range is-2.25A~7.5A.The sensitivity is 0.74?m/A,and the repeatability is 2.27%.The composite quartz cycloid micro-strain actuator has a damping effect that compresses the amplitude of the vibration to 26.85% of the original vibration signal.