Investigation On The Controllable Fabrication And The Application Of TiO₂-based Transparent Conductive Films

As a member of functional thin films,transparent conductive oxide(TCO)thin films are widely used for flat panel displayers(FPD),thin film solar cells,touch screens,and the glass for buildings and vehicles.ITO,the most commonly used TCO material,has outstanding optical and electronic performance.However,In is a raw material on the earth,and the supply is limited.Thus,the study for In-free TCO materials as the substitute of ITO becomes necessary.TiO2-based TCO material has drawn many attention among novel TCO materials,because of its rich abundance,low cost,hypo toxicity and high chemical stability.In this work,we pay attention to the controllable fabrication of high performance NTO(TiO2:Nb)films and their application for photocatalytic degradation of organic pollutants.The main results were listed as follow;To fabricate high performance NTO films in the controllable way,we studied the influence of sputtering power to the conductivity of NTO films,and established the relationship between the sputtering power,crystal cluster in as-grown film and the final crystalline phase.To avoid the appearance of rutile phase,we summarized the mechanism of film deposition and crystallization,then introduced NTO anatase seed layer and the process window was widen successfully.To study the photocatalytic performance,the photocatalytic ability for Rh B degradation of NTO films under solar light irradiation was tested.The NTO films with mixed phase of anatase and rutile shows better catalytic activity,due to the energy-band structure of n-n heterojunction and the effective separation of photogenerated charges.To study the industrialization of NTO films,this paper starts from the small samples,and gradually expands the preparation scale.By now the pilot scale test has been successfully completed,and the trial preparation on the production line is developing.