Research On Deep Ultraviolet Light-Emitting Diode Packaging And Its Applications

Due to the special structure and wavelength of deep ultraviolet LED(DUV-LED),the requirements for packaging materials are very strict,and organic materials cannot be used.In this paper,the research on DUV-LED packaging technology is carried out to solve some technical problems of DUV-LED packaging.A DUV-LED packaging structure and process are proposed,and a preliminary study on the application of DUV-LED device is made.The main research contents include:1)DUV-LED device package design: For the special characteristics of DUV-LED package,it is proposed to use all-inorganic materials for packaging: quartz glass is used as the transparent cover plate;three-dimensional ceramic substrate with cavity structure is used as the package substrate;Bonded quartz glass and ceramic substrate to achieve hermetic packaging.2)DUV-LED high-efficiency packaging technology: In order to improve the light-emitting efficiency of DUV-LED devices,a package structure containing Al reflective cavity is proposed.When the current is at 100 mA,the mirrored Al reflective inner cavity structure is used to make the deep ultraviolet LED output light.The efficiency increased by43.8%.3)DUV-LED packaging technology based on active heat dissipation: In view of the high junction temperature of DUV-LED modules,a DUV-LED packaging technology integrated with thermoelectric cooler(TEC)is proposed.When the TEC input current is 3A,the junction temperature of the DUV-LED module after stable operation is reduced from85? to 50?,which effectively improves the performance and reliability of the DUV-LED device.4)DUV-LED device application technology research: For the characteristics of DUV-LED,DUV-LED is applied in the field of sterilization and disinfection(includingdomestic water treatment,air disinfection in refrigerator,food preservation,etc.).